Surface morphology of heterogeneous nanocrystalline rutile/amorphous anatase TiO2 films grown by reactive pulsed magnetron sputtering

Plasma Processes and Polymers

Volumn 7, Issue 9-10, 2010, Pages 813-823

  Gago, Raúl ^a   Vinnichenko, Mykola ^b   Redondo Cubero, Andrés ^c   Czigány, Zsolt ^d   Vázquez, Luis ^a  

^a INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

^b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^c UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

^d RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

Author keywords

amorphous; magnetron; oxides; pulsed discharges; thin films

Indexed keywords

AMORPHOUS; ANATASE FILMS; ANATASE PHASE; ANATASE TIO; GROWTH CONDITIONS; GROWTH EVOLUTION; GROWTH TIME; HETEROGENEOUS PHASE; HOLLOW STRUCTURE; MID-FREQUENCY; MORPHOLOGY EVOLUTION; NANOCRYSTALLINE RUTILE; NANOCRYSTALLINES; NUMBER AND SIZE; PLASMA DISCHARGE; PULSED DISCHARGE; REACTIVE PULSED MAGNETRON SPUTTERING; ROUGH SURFACES; RUTILE AND ANATASE; RUTILE PHASE; SMOOTH REGIONS; STRUCTURAL EVOLUTION; SURFACE-ROUGHENING; TEM; TIO; TITANIUM DIOXIDE FILMS; TRANSMISSION ELECTRON; UNHEATED SUBSTRATES; VERTICAL GROWTH; X-RAY ABSORPTION NEAR-EDGE STRUCTURE; X-RAY DIFFRACTION AND ABSORPTION;

ABSORPTION; AMORPHOUS FILMS; ATOMIC FORCE MICROSCOPY; BIOLOGY; ELECTRIC DISCHARGES; FILM GROWTH; GROWTH RATE; MAGNETRON SPUTTERING; MIXTURES; MORPHOLOGY; OXIDE MINERALS; THIN FILMS; TITANIUM; TITANIUM DIOXIDE; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

SURFACE MORPHOLOGY;

EID: 78149443546     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200900182     Document Type: Article

References (42)

1. P. A. Cox, The Surface Science of Metal Oxides, Cambridge University Press, Cambridge 1994
2. U. Diebold, Surf. Sci. Rep. 2003, 48, 53.
3. J. Alami, K. Sarakinos, F. Uslu, C. Klever, J. Dukwen, M. Wuttig, J. Phys. D: Appl. Phys. 2009, 42, 115204.
4. Y. Furubayashi, T. Hitosugi, Y. Yamamoto, K. Inaba, G. Kinoda, Y. Hirose, T. Shimada, T. Hasegawa, Appl. Phys. Lett. 2005, 86, 252101
5. Y. Furubayashi, N. Yamada, Y. Hirose, Y. Yamamoto, M. Otani, T. Hitosugi, T. Shimada, T. Hasegawa, J. Appl. Phys. 2007, 101, 093705.
6. S. H. Mohamed, O. Kappertz, T. P. Leervad Pedersen, R. Drese, M. Wuttig, Phys. Status Solidi A 2003, 198, 224.
7. M. D. Wiggins, M. C. Nelson, C. R. Aita, J. Vac. Sci. Technol. A 1996, 14, 772.
8. P. Kern, R. Widmer, P. Gasser, J. Michler, J. Phys. Chem. C 2007, 111, 13972.
9. A.-M. Flank, P. Lagarde, J.-P. Itié, A. Polian, G. R. Hearne, Phys. Rev. B 2008, 77, 224112.
10. J. Stöhr, NEXAFS Spectroscopy, Springer, New York 1992.
11. F. M. F. de Groot, M. Grioni, J. C. Fuggle, J. Ghijsen, G. A. Sawatzky, H. Petersen, Phys. Rev. B 1989, 40, 5715.
12. C. McGuinness, C. B. Stagarescu, P. J. Ryan, J. E. Downes, D. Fu, K. E. Smith, R. G. Egdell, Phys Rev. B 2003, 68, 165104.
13. M. F. Smith, W. Klysubun, S. Kityakarn, A. Worayingyong, S. B. Zhang, S.-H. Wei, D. Onkaw, P. Songsiriritthigul, S. Rujirawat, S. Limpijumnong, J. Appl. Phys. 2009, 105, 024308.
14. S. O. Kucheev, T. van Buuren, T. F. Baumann, J. H. Satcher, T. M. Willey, R. W. Meulenberg, T. E. Felter, J. F. Poco, S. A. Gammon, L. J. Terminello, Phys. Rev. B 2004, 69, 245102.
15. H. Zhang, B. Chen, J. F. Banfield, G. A. Waychunas, Phys. Rev. B 2008, 78, 214106.
16. M. B. Casu, W. Braun, K. R. Bauchspie, S. Kera, B. Megner, C. Heske, R. Thull, E. Umbach, Surf. Sci. 2008, 602, 1599.
17. G. Antonioli, D. Bersani, P. P. Lottici, I. Manzini, G. Gnappi, A. Montenero, Nucl. Instrum. Methods Phys. Res. B 1995, 97, 198.
18. J. P. Holgado, A. Caballero, J. P. Espinós, J. Morales, V. M. Jiménez, A. Justo, A. R. Gonźlez-Elipe, Thin Solid Films 2000, 377-378, 460.
19. S. Schiller, G. Beister, W. Sieber, G. Shiermer, E. Hacker, Thin Solid Films 1981, 83, 239.
20. P. Löbl, M. Huppertz, D. Mergel, Thin Solid Films 1994, 251, 72.
21. O. Treichel, V. Kirchhoff, Surf. Coat. Technol. 2000, 123, 268.
22. J. M. Ngaruiya, O. Kappertz, S. H. Mohamed, M. Wuttig, Appl. Phys. Lett. 2004, 85, 748.
23. S. Mŕz, J. M. Scheneider, J. Appl. Phys. 2006, 100, 023503.
24. H. Irie, T. S. Ping, T. Shibata, K. Hashimoto, Electrochem. Solid-State Lett. 2005, 8, D23.
25. R. Carbone, M. De Marni, A. Zanardi, S. Vinati, E. Barborini, L. Fornasari, P. Milani, Anal. Biochem. 2009, 394, 7.
26. W. Zhou, X. Zhong, X. Wu, L. Yuan, Z. Zhao, H. Wang, Y. Xia, Y. Feng, J. He, W. Chen, Surf. Coat. Technol. 2006, 200, 6155.
27. L. B. Robertson, M. A. Poggi, J. Kowalik, G. P. Smestad, L. A. Bottomley, L. M. Tolbert, Coord. Chem. Rev. 2004, 248, 1491.
28. H. Al-Dmour, D. M. Taylor, J. A. Cambridge, J. Phys. D: Appl. Phys. 2007, 40, 5034.
29. W. K. Chu, J. W. Mayer, M. A. Nicholet, Backscattering Spectrometry, Academic Press, New York 1978.
30. E. Kótai, Nucl. Instrum. Methods B 1994, 85, 588.
31. D. E. Aspnes, J. B. Theeten, F. Hottier, Phys. Rev. B 1979, 20, 3292.
32. D. G. J. Sutherland, H. Akatsu, M. Copel, F. J. Himpsel, T. A. Callcot, J. A. Carlisle, D. L. Ederer, J. J. Jia, I. Jiménez, R. C. C. Perera, D. K. Shuh, L. J. Terminello, W. M. Tong, J. Appl. Phys. 1995, 78, 6761.
33. Physical Constants of Inorganic Compounds in: CRC Handbook of Chemistry and Physics, 89th edition, D. R. Lide, Ed. (Internet Version), CRC Press/Taylor and Francis, Boca Raton, FL 2009.
34. Physical,Optical Properties of Minerals in: CRC Handbook of Chemistry and Physics, 89th edition, D. R. Lide, Ed. (Internet Version), CRC Press/Taylor and Francis, Boca Raton, FL 2009.
35. A. Amassian, P. Desjardins, L. Martinu, Thin Solid Films 2004, 447-448, 40.
36. A. Borŕs, J. Cotrino, A. R. Gonźlez-Elipe, J. Electrochem. Soc. 2007, 154, P152.
37. R. Ruus, A. Kikas, A. Saar, A. Ausmees, E. Nommiste, J. Aarik, A. Aidla, T. Uustare, I. Martinson, Solid State Commun. 1997, 104, 199.
38. V. S. Lusvardi, M. A. Barteau, J. G. Chen, J. Eng, B. Frühberger, A. Teplyakov, Surf. Sci. 1998, 397, 237.
39. S. Räeth, F. Gracia, F. Yubero, J. P. Holgado, A. I. Martin, D. Batchelor, A. R. Goźlez-Elipe, Nucl. Instrum. Methods Phys. Res. B 2003, 200, 248.
40. J. P. Crocombette, F. Jollet, J. Phys.: Condens. Matter 1994, 6, 10811.
41. R. Brydson, H. Sauer, W. Engel, J. M. Thomas, E. Zeitler, N. Kosugi, H. Kuroda, J. Phys.: Condens. Matter 1989, 1, 797.
42. A. Brevet, M. C. Marco de Lucas, V. Potin, R. Chassagnon, L. Imhoff, B. Domenichini, S. Bourgeois, J. Phys. D: Appl. Phys. 2009, 42, 175302.