Rule-based data mining for yield improvement in semiconductor manufacturing

Applied Intelligence

Volumn 33, Issue 3, 2010, Pages 318-329

  Weiss, Sholom M ^a   Baseman, Robert J ^a   Tipu, Fateh ^a   Collins, Christopher N ^b   Davies, William A ^b   Singh, Raminderpal ^b   Hopkins, John W ^b  

^a IBM T J WATSON RESEARCH CENTER   (United States)

^b IBM   (United States)

Author keywords

Data mining; Industrial application; Regression rules decision rules; Semiconductor manufacturing

Indexed keywords

AUTOMATED SYSTEMS; BINARY REGRESSION; PERFORMANCE IMPROVEMENTS; PERFORMANCE VALUE; POWER CONSUMPTION; REGRESSION RULES/DECISION RULES; RULE BASED; SEMICONDUCTOR MANUFACTURING; SPEED CHARACTERISTICS; YIELD IMPROVEMENT;

AUTOMATION; DATA MINING; INDUSTRIAL APPLICATIONS; KNOWLEDGE BASED SYSTEMS; REGRESSION ANALYSIS;

MANUFACTURE;

EID: 78149284202     PISSN: 0924669X     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10489-009-0168-9     Document Type: Article

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