Tool commonality analysis for yield enhancement

IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings

Volumn , Issue , 2002, Pages 202-205

  Kong, George ^a  

^a MOTOROLA INC   (United States)

Author keywords

CMOS; Problem solving; Semiconducting; Tool commonality; Yield enhancement

Indexed keywords

ELECTRONICS INDUSTRY; PROCESS CONTROL; STATISTICAL METHODS; TIME SERIES ANALYSIS; ULSI CIRCUITS;

RAW DATA CLASSIFICATION; SAMPLE SIZE SELECTION; TOOL COMMONALITY ANALYSIS; YIELD ENHANCEMENT;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0036072946     PISSN: 1523553X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. Case study for root cause analysis of yield problems
2. The identification and analysis of systematic yield loss