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Volumn , Issue , 2002, Pages 266-271
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Statistical modeling and analysis of wafer test fail counts
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Author keywords
Fail counts; Principal component analysis; Yield analysis; Yield improvement; Yield modeling
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Indexed keywords
DATA REDUCTION;
ELECTRIC NETWORK PARAMETERS;
INTEGRATED CIRCUIT MANUFACTURE;
PRINCIPAL COMPONENT ANALYSIS;
REGRESSION ANALYSIS;
SEMICONDUCTOR DEVICE MODELS;
WSI CIRCUITS;
MULTIPLE LINEAR REGRESSION;
STATISTICAL MODELING;
WAFER TEST FAIL COUNTS;
YIELD ANALYSIS;
YIELD IMPROVEMENT;
YIELD MODELING;
SEMICONDUCTOR DEVICE TESTING;
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EID: 0036075550
PISSN: 1523553X
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (8)
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References (5)
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