A data mining project for solving low-yield situations of semiconductor manufacturing

IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings

Volumn , Issue , 2004, Pages 129-134

  Chen, Wei Chou ^a   Tseng, Shian Shyong ^a   Hsiao, Kuo Rong ^b   Liu, Chia Chun ^b  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY   (Taiwan)

Author keywords

Data Mining; Engineering Data Analysis; Failure Analysis; Knowledge Discovery; Yield Enhancement

Indexed keywords

DATA MINING; DATA REDUCTION; FAILURE ANALYSIS; MATRIX ALGEBRA; SEMICONDUCTOR DEVICES; STATISTICAL METHODS;

ENGINEERING DATA ANALYSIS; KNOWLEDGE DISCOVERY; PRODUCT ENGINEERS; YIELD ENHANCEMENT;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 4544248352     PISSN: 1523553X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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