fPa/t to ftrt: Basis for a Systematic Geometric Design Tool for Surface Micromachined MEMS

Proceedings of the ASME Design Engineering Technical Conference

Volumn 2, Issue , 2000, Pages 357-370

  Venkataraman, Venkat A ^a   Sarma, Radha ^a   Ananthasuresh, Suresh G K ^b  

^a Toledo   (United States)

^b UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

Geometric Modeling; Image Processing; MEMS; Morphology

Indexed keywords

GEOMETRY; INVERSE PROBLEMS; MEMS;

BEHAVIOURAL SIMULATIONS; DESIGN TOOL; GEOMETRIC DESIGN; GEOMETRIC MODELS; IMAGES PROCESSING; MASK DATA; MICROMACHINED DEVICES; NEW DEVICES; SURFACE MICROMACHINED MEMS; TOOLPATHS;

IMAGE PROCESSING;

EID: 78049295563     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/DETC2000/DAC-14251     Document Type: Conference Paper

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