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Volumn 125, Issue 1-2, 2011, Pages 242-246

Eggshell- and fur-like microstructures of yttrium silicate film prepared by laser chemical vapor deposition

Author keywords

Chemical vapor deposition; Microporous materials; Microstructure; Oxides

Indexed keywords

DEPOSITION TEMPERATURES; DIPIVALOYLMETHANE; DOME-LIKE STRUCTURES; IN-SHELL; LASER CHEMICAL VAPOR DEPOSITION; MICRO-POROUS; ND : YAG LASERS; TETRAETHYL ORTHOSILICATES; TOTAL PRESSURE; Y(DPM)3; YTTRIUM SILICATES;

EID: 78049254410     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchemphys.2010.09.014     Document Type: Article
Times cited : (12)

References (35)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.