Humidity sensing characteristics of Ga-doped zinc oxide film grown on a polycrystalline AlN thin film based on a surface acoustic wave

Sensors and Actuators, B: Chemical

Volumn 150, Issue 2, 2010, Pages 681-685

  Hong, Hoang Si ^a   Chung, Gwiy Sang ^a  

^a University of Ulsan   (South Korea)

Author keywords

AlN thin film; Ga doped ZnO; Humidity sensor; SAW; Sol gel

Indexed keywords

ALN; ALN THIN FILMS; CENTER FREQUENCY; FREQUENCY SHIFT; GA DOPANTS; GA DOPING; GA-DOPED; GA-DOPED ZNO; HUMIDITY SENSING; LAYERED STRUCTURES; NANOCRYSTALLINES; POLYCRYSTALLINE; RELATIVE HUMIDITIES; SENSING LAYERS; SENSING RESPONSE; SURFACE ACOUSTIC WAVES; TRANSMISSION CHARACTERISTICS;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTICS; ACOUSTOELECTRIC EFFECTS; ALUMINUM NITRIDE; FREQUENCY RESPONSE; GELS; HUMIDITY SENSORS; NITRIDES; OXIDE FILMS; SEMICONDUCTOR DOPING; SOL-GEL PROCESS; SOL-GELS; SOLS; THIN FILMS; VAPOR DEPOSITION; ZINC OXIDE;

ATMOSPHERIC HUMIDITY;

EID: 77958507405     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2010.08.020     Document Type: Article

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