Digital phase detection approach and its application for AlN dual-mode differential surface acoustic wave sensing

Sensors and Actuators, B: Chemical

Volumn 132, Issue 1, 2008, Pages 272-279

  Hu, Guopeng ^a   Xu, Jianzeng ^b   Auner, Gregory W ^a   Smolinski, Joseph ^a   Ying, Hao ^a  

^a Wayne State University   (United States)

^b QUEEN S UNIVERSITY   (Canada)

Author keywords

AlN; Conductivity; Digital phase detection; SAW; SH SAW

Indexed keywords

ACOUSTIC WAVES; DIGITAL SIGNAL PROCESSING; ELECTRIC CONDUCTIVITY; PARAMETER ESTIMATION; SIGNAL INTERFERENCE; THIN FILMS;

DIFFERENTIAL SYSTEMS; DIGITAL PHASE DETECTION; THIN FILM STRUCTURE;

SENSORS;

EID: 43749106236     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2008.01.037     Document Type: Article

References (22)

1. Ballantine D.S., White R.M., Marti S.J., Ricco A.J., Zeller E.T., Frye G.C., and Wohltjen H. Acoustic Wave Sensors: Theory, Design, and Physico-Chemical Applications (1997), Academic Press, San Diego
2. Farias R.H.A., Lin L., Rodrigues A.R.D., Tavares P.F., and Hofmann A. Oscilloscope measurement of the synchronous phase shift in an electron storage ring. Phys. Rev. Spec. Top-Ac. 4 7 (2001) 1-8
3. Okano H., Tanaka N., Takahashi Y., Tanaka T., Shibata K., and Nakano S. Preparation of aluminum nitride thin-films by reactive sputtering and their applications to GHz-band surface-acoustic-wave devices. Appl. Phys. Lett. 64 2 (1994) 166-168
4. Xu J., Hu G., Auner G.W., and Ying H. Mass sensitivity of dual mode SAW delay lines on an AlN/sapphire structure. Electron. Lett. 41 (2005) 1254-1255
5. Takagaki Y., Santos P.V., Wiebicke E., Brandt O., Schonherr H.P., and Ploog K.H. Guided propagation of surface acoustic waves in AlN and GaN films grown on 4H-SiC(0 0 0 1) substrates. Phys. Rev. B 66 155439 (2002) 1-7
6. Xu J., Thakur J.S., Hu G., Wang Q., Danylyuk Y., Ying H., and Auner G.W. Angular dependence of surface acoustic wave characteristics in AlN thin films on a-plane sapphire substrates. Appl. Phys. A 83 3 (2006) 411-415
7. Tsui J. Digital Techniques for Wideband Receivers (2001), Artech House, Boston
8. Pintelon R., and Schoukens J. An improved sine-wave fitting procedure for characterizing data acquisition channels. IEEE Trans. Instrum. Meas. 45 2 (1996) 588-593
9. Hu G., Ying H., Du X., Xu J., Smolinsky J., and Auner G. Digital phase detection for high-precision surface acoustic wave sensor systems. Proceedings of 2005 Joint IEEE International Frequency Control Symposium and Precise Time and Time Interval Systems and Applications Meeting. Vancouver, BC, Canada, August 2-31 (2005)
10. Swanson D.C. Signal Processing for Intelligent Sensor Systems (2000), Marcel Dekker Inc., New York
11. Phillips G.M. Interpolation and Approximation by Polynomials (2003), Springer
12. Porat B. A Course in Digital Signal Processing (1997), John Wiley & Sons, Inc., New York
13. Djokic B., and So E. Phase measurement of distorted periodic signals based on nonsynchronous digital filtering. IEEE Trans. Instrum. Meas. 50 4 (2001) 864-867
14. Guo P.K., Auner G.W., and Wu Z.L. Microstructure and thermal conductivity of epitaxial AlN thin films. Thin Solid Films 253 (1994) 223
15. Campbell C. Surface Acoustic Wave Devices and Their Signal Processing Applications (1989), Academic Press, New York
16. Kondoh J., Matsui Y., and Shiokawa S. Identification of electrolyte solutions using a shear horizontal surface acoustic wave sensor with a liquid-flow system. Sens. Actuators B 91 (2003) 309-315
17. Niemczyk T.M., Martin S.J., Frye G.C., and Ricco A.J. Acoustoelectric interaction of plate modes with solutions. J. Appl. Phys. 64 10 (1988) 5002-5008
18. Gori S., and Narduzzi C. Application of a phase measurement algorithm to digitizing oscilloscope characterization. IEEE Trans. Instrum. Meas. 49 6 (2000) 1211-1215
19. Stenbakken G.N., and Deyst J.P. Comparison of time base nonlinearity measurement techniques. IEEE Trans. Instrum. Meas. 47 (1998) 34-39
20. Wagdy M.F., and Awad S.S. Effect of sampling jitter on some sine wave measurements. IEEE Trans. Instrum. Meas. 39 1 (1990) 86-89
21. Josse F., and Shana Z. Acoustoionic interaction of SH surface acoustic waves with diluted ionic solutions. IEEE Trans. Ultrason. Ferr. 38 3 (1991) 297-304
22. Ambacher O. Growth and applications of Group III-nitride. J. Phys. D: Appl. Phys. 31 (1998) 2653-2710