Development of a tunable polarimetric scatterometry system in the MWIR and LWIR

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7792, Issue , 2010, Pages

  Fitzgerald, Thomas M ^a   Marciniak, Michael A ^a   Nauyoks, Stephen E ^a  

^a Air Force Institute of Technology   (United States)

Author keywords

Diffuse ellipsometry; Dual rotating Retarder polarimeter; LWIR; Metamaterial; MWIR; Photonic crystals; Plasmonics; Polarimetric scatterometry

Indexed keywords

DIFFUSE ELLIPSOMETRY; DUAL-ROTATING- RETARDER POLARIMETER; LWIR; MWIR; PLASMONICS; SCATTEROMETRY;

DIFFRACTION; ELLIPSOMETRY; LIGHT SOURCES; MAGNETIC PROPERTIES; MATERIALS; METAMATERIALS; PLASMONS; POLARIMETERS; POLAROGRAPHIC ANALYSIS; ROTATION; UNCERTAINTY ANALYSIS;

PHOTONIC CRYSTALS;

EID: 77958103702     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.859870     Document Type: Conference Paper

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