RF MEMS tunable inductor

15th International Conference on Microwaves, Radar and Wireless Communications, MIKON - 2004

Volumn 3, Issue , 2004, Pages 817-819

  Zine El Abidine, I ^a   Okoniewski, M ^a   McRory, J G ^a  

^a UNIVERSITY OF CALGARY   (Canada)

Author keywords

Inductor; MEMS; Radio frequency; Tunable

Indexed keywords

ACTUATORS; ANISOTROPY; ELECTRIC INDUCTORS; ELECTROMAGNETISM; ELECTROSTATICS; ETCHING; NATURAL FREQUENCIES; OPTIMIZATION; SCANNING ELECTRON MICROSCOPY;

MEMS; RADIO FREQUENCIES; TRANSCEIVER SYSTEMS; TUNABLE;

MICROELECTROMECHANICAL DEVICES;

EID: 11244344016     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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