Solution growth of metal-organic complex CuTCNQ in small dimension interconnect structures

Journal of Crystal Growth

Volumn 312, Issue 22, 2010, Pages 3267-3275

  Demolliens, A ^a   Muller, Ch ^b   Mller, R ^c   Turquat, Ch ^a   Goux, L ^c   Deleruyelle, D ^b   Wouters, D J ^c  

^a UNIVERSITÉ DE TOULON   (France)

^b AIX MARSEILLE UNIVERSITÉ   (France)

^c IMEC   (Belgium)

Author keywords

A2. Growth for solutions; B1. Charge transfer complex; B2. Semiconducting materials; B3. Resistive switching memories

Indexed keywords

A2. GROWTH FOR SOLUTIONS; BOTTOM ELECTRODES; CHARGE TRANSFER COMPLEX; CU LAYERS; ELECTRICAL PERFORMANCE; INTERCONNECT STRUCTURES; LIQUID PHASE; METAL-ORGANIC COMPLEXES; METALLIC ELECTRODES; QUALITY OF INTERFACES; RESISTIVE SWITCHING MEMORIES; SALT SOLUTION; SEMICONDUCTING MATERIALS; SOLUTION GROWTH; SOLUTION GROWTH METHOD; VIA HOLE;

CHARGE TRANSFER; COPPER COMPOUNDS; KETONES; ORGANOMETALLICS; SILICON CARBIDE; SWITCHING SYSTEMS;

SEMICONDUCTOR GROWTH;

EID: 77957836368     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2010.08.008     Document Type: Article

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