Optical properties of evaporated poly-Si thin-films on glass

Thin Solid Films

Volumn 519, Issue 1, 2010, Pages 351-356

  He, Song ^a   Sproul, Alistair B ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

Absorption coefficient; Boron; Evaporated poly Si films; Phosphorus; Solid phase crystallization; Tauc Lorentz model; Thin films; WVASE fitting

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS SILICON; BORON; BOROSILICATE GLASS; GRAIN BOUNDARIES; METALLIC FILMS; OPTICAL PROPERTIES; PHOSPHORUS; POLYCRYSTALLINE MATERIALS; SEMICONDUCTOR DOPING; SILICON COMPOUNDS; SUPERCONDUCTING FILMS;

ABSORPTION CO-EFFICIENT; POLY-SI FILMS; SOLID PHASE CRYSTALLIZATION; TAUC-LORENTZ MODELS; WVASE FITTING;

THIN FILMS;

EID: 77957750510     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2010.07.100     Document Type: Article

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