Crystal quality improvement of solid-phase crystallized evaporated silicon films by in-situ densification anneal

Solar Energy Materials and Solar Cells

Volumn 93, Issue 6-7, 2009, Pages 1116-1119

  He, Song ^a   Hoex, Bram ^b   Inns, Daniel ^a   Brazil, Ian C ^a   Widenborg, Per I ^a   Aberle, Armin G ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

^b EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

a Si films; Densification anneal; e beam evaporation; Poly Si films

Indexed keywords

A-SI FILMS; BENEFICIAL EFFECTS; CRYSTAL QUALITIES; E-BEAM EVAPORATION; EVAPORATED SILICONS; HIGH RATES; IN-SITU; OXYGEN CONTENTS; POLY-SI FILMS; SI FILMS; SI(1 0 0 ); SOLID-PHASE; TUBE FURNACES;

DENSIFICATION; EVAPORATION; OXYGEN; SEMICONDUCTING SILICON COMPOUNDS; SILICON; SUPERCONDUCTING FILMS; VAPORS;

SILICON WAFERS;

EID: 67349164020     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2009.01.012     Document Type: Article

References (6)

1. P.A. Basore, Pilot production of thin film crystalline silicon on glass modules, in: Proceedings of the 29th IEEE Photovoltaic Specialists Conference, 2002, pp. 49-52.
2. Catchpole K.R., McCann M.J., Weber K.J., and Blakers A.W. A review of thin film crystalline silicon for solar cell applications. Solar Energy Materials and Solar Cells 68 (2001) 173-215
3. Magee C.W., Bean J.C., Foti G., and Poate J.M. Observation of gas absorption in evaporated amorphous silicon films using secondary ion mass spectrometry. Thin Solid Films 81 (1981) 1-6
4. Straub A., Widenborg P.I., Sproul A., Huang Y., Harder N.P., and Aberle A.G. Fast and non-destructive assessment of epitaxial quality of polycrystalline silicon films on glass by optical measurements. Journal of Crystal Growth 265 (2004) 168-173
5. Hung L.S., Lau S.S., Von Allmen M., Mayer J.W., et al. Epitaxial growth of Si deposited on (1 0 0) Si. Applied Physics Letters 37 10 (1980) 909-911
6. Sinke W., Warabisako T., Miyao M., Tokuyama T., et al. Transient structural relaxation of amorphous silicon. Journal of Non-Crystalline Solids 99 (1988) 308-323