|
Volumn 2725, Issue , 1996, Pages 450-459
|
Optical characterization of polycrystalline silicon thin films
a a a a |
Author keywords
[No Author keywords available]
|
Indexed keywords
OPTICAL CONSTANTS;
POLYCRYSTALS;
CHARACTERIZATION;
CRYSTALS;
ELLIPSOMETRY;
LIGHT REFLECTION;
OPTICAL PROPERTIES;
SEMICONDUCTING SILICON;
SPECTROSCOPY;
THIN FILMS;
TRANSMISSION ELECTRON MICROSCOPY;
SEMICONDUCTING FILMS;
|
EID: 0029727696
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (8)
|
References (10)
|