SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 519, Issue 1, 2010, Pages 312-318

Nanomechanical characterization of thermally evaporated Cr thin films - FE analysis of the substrate effect

(4) Kataria, S a Goyal, Sunil a Dash, S a Tyagi, A K a

a INDIRA GANDHI CENTRE FOR ATOMIC RESEARCH (India)

Author keywords

Deformation; Finite element analysis; Hardness; Nanoindentation; Thin films

Indexed keywords

CHROMIUM THIN FILMS; CIRCUMFERENTIAL CRACKS; CR FILM; DEFORMATION BEHAVIOUR; DIFFERENT SUBSTRATES; FE ANALYSIS; FINITE ELEMENT ANALYSIS; HARD FILMS; HARD SUBSTRATE; HARDNESS VARIATION; NANOINDENTATION TECHNIQUES; NANOMECHANICAL CHARACTERIZATION; PLASTIC ZONES; RADIAL CRACKS; SI(1 0 0); SOFT FILM; SOFT SUBSTRATES; STRESS DISTRIBUTION; SUBSTRATE EFFECTS;

CHROMIUM; CRACKS; DEFORMATION; FINITE ELEMENT METHOD; HARDNESS; NANOINDENTATION; STRESS CONCENTRATION; THIN FILMS; VAPOR DEPOSITION;

SUBSTRATES;

EID: 77957718320 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2010.07.055 Document Type: Article

Times cited : (14)

References (26)

1
- 0041345927
- B. Bhushan, and X. Li Int. Mater. Rev. 48 2003 125
- (2003) Int. Mater. Rev. , vol.48 , pp. 125
- Bhushan, B.¹ Li, X.²

2
- 0037039185
- R. Saha, and W.D. Nix Acta Mater. 50 2002 23
- (2002) Acta Mater. , vol.50 , pp. 23
- Saha, R.¹ Nix, W.D.²

3
- 0037158665
- E.S. Puchi-Cabrera, J.A. Berrios, and D.G. Teer Surf. Coat. Technol. 157 2002 185
- (2002) Surf. Coat. Technol. , vol.157 , pp. 185
- Puchi-Cabrera, E.S.¹ Berrios, J.A.² Teer, D.G.³

4
- 0036478720
- X. Li, and B. Bhushan Mater. Character. 48 2002 11
- (2002) Mater. Character. , vol.48 , pp. 11
- Li, X.¹ Bhushan, B.²

5
- 77957690864
- N. Panich, V. Kraivichien, and S. Yong J. Sci. Res. Chula Univ. 29 2004 145
- (2004) J. Sci. Res. Chula Univ. , vol.29 , pp. 145
- Panich, N.¹ Kraivichien, V.² Yong, S.³

6
- 33746885514
- H. Pelletier, J. Krier, and P. Mille Mech. Mater. 38 2006 1182
- (2006) Mech. Mater. , vol.38 , pp. 1182
- Pelletier, H.¹ Krier, J.² Mille, P.³

7
- 1342302479
- Y.J. Park, and G.M. Pharr Thin Solid Films 447 448 2004 246
- (2004) Thin Solid Films , vol.447 , Issue.448 , pp. 246
- Park, Y.J.¹ Pharr, G.M.²

8
- 0027595863
- H.F. Wang, and H. Bangert Mater. Sci. Eng. A 163 1993 43
- (1993) Mater. Sci. Eng. A , vol.163 , pp. 43
- Wang, H.F.¹ Bangert, H.²

9
- 25644438590
- S.-M. Jeong, and H.-L. Lee Thin Solid Films 492 2005 173
- (2005) Thin Solid Films , vol.492 , pp. 173
- Jeong, S.-M.¹ Lee, H.-L.²

10
- 33750626254
- A.J.M. Wood, and T.W. Clyne Acta Mater. 54 2006 5607
- (2006) Acta Mater. , vol.54 , pp. 5607
- Wood, A.J.M.¹ Clyne, T.W.²

11
- 64349114036
- J. Chen, and S.J. Bull Thin Solid Films 517 2009 3704
- (2009) Thin Solid Films , vol.517 , pp. 3704
- Chen, J.¹ Bull, S.J.²

12
- 64349102976
- N.-K. Chang, Y.-S. Lin, C.-Y. Chen, and S.-H. Chang Thin Solid Films 517 2009 3695
- (2009) Thin Solid Films , vol.517 , pp. 3695
- Chang, N.-K.¹ Lin, Y.-S.² Chen, C.-Y.³ Chang, S.-H.⁴

13
- 67349221089
- C. Walter, and C. Mitterer Surf. Coat. Technol. 203 2009 3286
- (2009) Surf. Coat. Technol. , vol.203 , pp. 3286
- Walter, C.¹ Mitterer, C.²

14
- 0032203072
- M. Lichinchi, C. Lenardi, J. Haupt, and R. Vitali Thin Solid Films 333 1998 278
- (1998) Thin Solid Films , vol.333 , pp. 278
- Lichinchi, M.¹ Lenardi, C.² Haupt, J.³ Vitali, R.⁴

15
- 0001502951
- Y. Sun, T. Bell, and S. Zheng Thin Solid Films 258 1995 198
- (1995) Thin Solid Films , vol.258 , pp. 198
- Sun, Y.¹ Bell, T.² Zheng, S.³

16
- 33947210196
- M.T. Tilbrook, D.J. Paton, Z. Xie, and M. Hoffman Acta Mater. 55 2007 2489
- (2007) Acta Mater. , vol.55 , pp. 2489
- Tilbrook, M.T.¹ Paton, D.J.² Xie, Z.³ Hoffman, M.⁴

17
- 35448948210
- A.A. Pelegri, and X. Huang Comp. Sci. Technol. 68 2008 147
- (2008) Comp. Sci. Technol. , vol.68 , pp. 147
- Pelegri, A.A.¹ Huang, X.²

18
- 0026875935
- W.C. Oliver, and G.M. Pharr J. Mater. Res. 7 1992 1564
- (1992) J. Mater. Res. , vol.7 , pp. 1564
- Oliver, W.C.¹ Pharr, G.M.²

19
- 0346093915
- M. Mata, and J. Alcala J. Mech. Phy. Solids 52 2004 145
- (2004) J. Mech. Phy. Solids , vol.52 , pp. 145
- Mata, M.¹ Alcala, J.²

20
- 52749085571
- W.-G. Jiang, J.-J. Su, and X.-Q. Feng Eng. Fract. Mech. 75 2008 4965
- (2008) Eng. Fract. Mech. , vol.75 , pp. 4965
- Jiang, W.-G.¹ Su, J.-J.² Feng, X.-Q.³

21
- 13844280308
- J.-I. Jang, M.J. Lance, S. Wen, T.Y. Tsui, and G.M. Pharr Acta Mater. 53 2005 1759
- (2005) Acta Mater. , vol.53 , pp. 1759
- Jang, J.-I.¹ Lance, M.J.² Wen, S.³ Tsui, T.Y.⁴ Pharr, G.M.⁵

22
- 0035451912
- R. Saha, Z. Xue, Y. Huang, and W.D. Nix J. Mech. Phy. Solids 49 2001 1997
- (2001) J. Mech. Phy. Solids , vol.49 , pp. 1997
- Saha, R.¹ Xue, Z.² Huang, Y.³ Nix, W.D.⁴

23
- 33846325786
- S.K. Vanimisetti, and R. Narasimhan Thin Solid Films 515 2007 3277
- (2007) Thin Solid Films , vol.515 , pp. 3277
- Vanimisetti, S.K.¹ Narasimhan, R.²

24
- 0000815015
- M. Pang, and D.F. Bahr J. Mater. Res. 16 2001 2634
- (2001) J. Mater. Res. , vol.16 , pp. 2634
- Pang, M.¹ Bahr, D.F.²

25
- 0012489320
- Springer-Verlag New York
- A.C. Fischer-Cripps Nanoindentation 2002 Springer-Verlag New York
- (2002) Nanoindentation
- Fischer-Cripps, A.C.¹

26
- 0037066164
- A. Abdul-Baqi, and E.Vd Giessen Int. J. Solids Struct 39 2002 1427
- (2002) Int. J. Solids Struct , vol.39 , pp. 1427
- Abdul-Baqi, A.¹ Giessen, E.Vd.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.