Characterization of mechanical properties of thin films using nanoindentation test

Mechanics of Materials

Volumn 38, Issue 12, 2006, Pages 1182-1198

  Pelletier, Hervé ^a   Krier, Joël ^a   Mille, Pierre ^a  

^a INSA DE STRASBOURG   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTRON BEAMS; EVAPORATION; FINITE ELEMENT METHOD; HARDNESS; INDENTATION; NANOTECHNOLOGY;

CONTACT DEPTH; ELECTRON BEAM EVAPORATION; FILM PROPERTIES; SUBSTRATE HARDNESS VALUES;

THIN FILMS;

EID: 33746885514     PISSN: 01676636     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mechmat.2006.02.011     Document Type: Article

References (35)

1. Bhattacharya A.K., and Nix W.D. Int. J. Solids Structures 2 12 (1988) 1287
2. Bolshakov A., and Pharr G.M. J. Mater. Res. 13 (1998) 1049
3. Bückle H. In: Westbroock J.W., and Conrads H. (Eds). The Science of Hardness Testing and its Research Applications (1973), American Society for Metals, Metals Park, OH 453
4. Burnett P.J., and Rickerby D.S. Thin Solid Films 148 (1987) 41
5. Chechenin N.G., Bottinger J., and Krog J.P. Thin Solid Films 261 (1995) 219
6. Cheng Y.T., and Cheng C.M. J. Mater. Res. 13 (1998) 1059
7. Fabes B.D., Oliver W.C., McKee R.A., and Walker F.J. J. Mater. Res. 7 (1992) 3056
8. Gao H., Chin C.H., and Lee J. Int. J. Solids Struct. 29 (1992) 2471
9. Giannakopoulos A.E., Larrson P.L., and Vestergaard R. Int. J. Solids Struct. 31 (1994) 2679
10. Hainsworth S.V., Bartlett T., and Page T.F. Thin Solid Films 236 (1993) 214
11. Hainsworth S.V., Chandler H.W., and Page T.F. J. Mater. Res. 11 (1996) 1987
12. Jayaraman S., Hahn G.T., Oliver W.C., Rubin C.A., and Bastias P.C. Int. J. Solids Struct. 35 5-6 (1998) 365
13. Johnson K.L. J. Mech. Phys. Solids 18 (1970) 115
14. Knapp J.A., Follstaedt D.M., Myers S., Barbour J.C., and Friedmann T.A. J. Appl. Phys. 85 (1999) 1460
15. Laursen T.A., and Simo J.C. J. Mater. Res. 7 (1992) 618
16. Lichinchi M., Lernadi C., Haupt J., and Vitali R. Thin Solid Films 312 (1998) 240
17. Loubet J.L., Georges J.M., Marchesini O., and Meille G. J. Tribol. 106 (1984) 43
18. Loubet J.L., Georges J.M., and Meille G. In: Blau P.J., and Lawn B.R. (Eds). Microindentation Techniques in Materials Science and Engineering. ASTM STP 889 (1986), ASTM, Philadelphia 72
19. Ma D., Xu K., and He J. Thin Solid Films 323 (1998) 183
20. Marsh D.M. Proc. R. Soc. A 279 (1964) 420
21. McGurk M.R., and Page T.F. J. Mater. Res. 14 (1999) 2283
22. Mencik J., Munz D., Quandt E., Weppelman E.R., and Swain M.V. J. Mater. Res 12 (1997) 2475
23. Newey D., Wilkens M.A., and Pollock H.M. J. Phys. E: Sci. Instrum. 19 (1982) 119
24. Oliver W.C., and Pharr G.M. J. Mater. Res. 7 (1992) 1564
25. Pelletier, H., 2001. Ph.D. thesis, Université Louis Pasteur, Strasbourg.
26. Pelletier H., Krier J., Mille P., and Cornet A. Thin Solid Films 379 (2000) 147
27. Pethica J.B., Hutchings R., and Oliver W.C. Philos. Mag. A 48 (1983) 593
28. Pharr G.M. Mater. Sci. Eng. A 253 (1998) 151
29. Pharr G.M., and Oliver W.C. MRS Bull. 17 (1992) 28
30. Raymond-Angélélis, C., 1998. Ph.D. thesis, Ecole des Mines de Paris.
31. Sun Y., Bell T., and Zheng S. Thin Solid Films 258 (1995) 204
32. Tang K.C., Faulkner A., Schwarzer N., Arnell R.D., and Richter F. Thin Solid Films 300 (1997) 177
33. Tsui T.Y., and Pharr G.M. J. Mater. Res. 14 (1999) 292
34. Tsui T.Y., Vlassak J., and Nix W.D. J. Mater. Res. 14 (1999) 2196
35. Vingsbo O., Hogmark S., Jönsson B., and Ingemarsson A. In: Blau P.J., and Lawn B.R. (Eds). Microindentation Techniques in Materials Science and Engineering. ASTM STP 889 (1986), ASTM, Philadelphia 257