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Volumn , Issue , 2008, Pages 775-783

Experimental research on electrochemical micromachining

Author keywords

Accuracy; Electrochemical micro machining; Micro electrode; Side gap

Indexed keywords

DESIGN; ELECTROCHEMICAL CUTTING; ELECTRODES; ELECTROLYTES; MICROOPTICS; MICROSTRUCTURE;

EID: 77957360269     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1007/978-1-84800-241-8_78     Document Type: Conference Paper
Times cited : (5)

References (16)
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    • Electrochemical machining of stainless steel microelements with ultrashort voltage pulses
    • DOI 10.1063/1.1401783
    • Viola Kirchner, Laurent Cagnon, Rolf Schuster, (2001) Electrochemical machining of stainless steel microelements with ultrashort voltage pulses. Appl. Phys. Lett. 79: 1721-1723 (Pubitemid 33598516)
    • (2001) Applied Physics Letters , vol.79 , Issue.11 , pp. 1721-1723
    • Kirchner, V.1    Cagnon, L.2    Schuster, R.3    Ertl, G.4
  • 8
    • 0032162749 scopus 로고    scopus 로고
    • Microfabrication by electrochemical metal removal
    • M. Datta, (1998) Microfabrication by electrochemical metal removal. IBM J Research Develop 42: 655-669
    • (1998) IBM J Research Develop , vol.42 , pp. 655-669
    • Datta, M.1
  • 9
    • 0041467401 scopus 로고    scopus 로고
    • Electrochemical micromachining, polishing and surface structuring of metals: Fundamental aspects and new developments
    • D. Landolt, P.-F. Chauvy, O. Zinger, (2003) Electrochemical micromachining, polishing and surface structuring of metals: fundamental aspects and new developments. Electrochimica Acta Vol48, 30:3185-3201
    • (2003) Electrochimica Acta , vol.48 , Issue.30 , pp. 3185-3201
    • Landolt, D.1    Chauvy, P.-F.2    Zinger, O.3
  • 10
    • 73249123345 scopus 로고    scopus 로고
    • Micro wire electrochemical cutting by using in situ fabricated wire electrode
    • D. Zhu, K. Wang, N.S. Qu, (2007) Micro Wire Electrochemical Cutting by Using In Situ Fabricated Wire Electrode. Annals of the CIRP 56:241-244
    • (2007) Annals of the CIRP , vol.56 , pp. 241-244
    • Zhu, D.1    Wang, K.2    Qu, N.S.3
  • 12
    • 0035546622 scopus 로고    scopus 로고
    • An electrochemical fabrication method for extremely thin cylindrical micropin
    • Lim Y. M., Kim S. H., (2001) An Electrochemical Fabrication Method for Extremely Thin Cylindrical Micropin. International Journal of Machine Tools & Manufacture 41:2287-2296.
    • (2001) International Journal of Machine Tools & Manufacture , vol.41 , pp. 2287-2296
    • Lim, Y.M.1    Kim, S.H.2
  • 13
    • 33747431866 scopus 로고    scopus 로고
    • Fabrication of micro-pin based on electrochemical etching
    • M.H.Wang, D. Zhu, C.Y.Zhang, (2006) Fabrication of micro-pin based on electrochemical etching. Chinese J. Mech. Eng. 42: 128-132
    • (2006) Chinese J. Mech. Eng. , vol.42 , pp. 128-132
    • Wang, M.H.1    Zhu, D.2    Zhang, C.Y.3
  • 14
    • 0034874484 scopus 로고    scopus 로고
    • Electrochemical nanostructuring with ultrashort voltage pulses
    • Kirchner V., Xia X. H., Schuster R., (2001) Electrochemical Nanostructuring with Ultrashort Voltage Pulses. Acc. Chem. Res. 34: 371-377
    • (2001) Acc. Chem. Res. , vol.34 , pp. 371-377
    • Kirchner, V.1    Xia, X.H.2    Schuster, R.3
  • 15
    • 0042970310 scopus 로고    scopus 로고
    • Electrochemical micromachining with ultrashort voltage pulses: A versatile method with lithographical precision
    • M. Kock, V. Kirchner, R. Schuster, (2003) Electrochemical micromachining with ultrashort voltage pulses: a versatile method with lithographical precision. Electrochimica Acta 48: 3213-3219
    • (2003) Electrochimica Acta , vol.48 , pp. 3213-3219
    • Kock, M.1    Kirchner, V.2    Schuster, R.3
  • 16
    • 55049085774 scopus 로고    scopus 로고
    • Theoretical and experimental investigation on electrochemical micromachining
    • Zh.Y. Zhang, D. Zhu, N.S. Qu, M.H. Wang, (2007) Theoretical and experimental investigation on electrochemical micromachining. Microsyst Technol 13:607-612
    • (2007) Microsyst Technol , vol.13 , pp. 607-612
    • Zhang, Zh.Y.1    Zhu, D.2    Qu, N.S.3    Wang, M.H.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.