Fabrication of micro-pin based on electrochemical etching

Jixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering

Volumn 42, Issue 6, 2006, Pages 128-132

  Wang, Minghuan ^a   Zhu, Di ^a   Zhang, Zhaoyang ^a  

^a NANJING UNIVERSITY OF AERONAUTICS AND ASTRONAUTICS   (China)

Author keywords

Electrochemical etching; Micro machining; Micro pin

Indexed keywords

CURRENT CHANGING; ELECTROCHEMICAL ETCHING; ELECTROCHEMICAL PRINCIPLE; ELECTROLYTE CONCENTRATION; MICROPIN; SHAPING MECHANISM; THEORY MODEL;

ASPECT RATIO; ELECTROLYTES; ETCHING; FABRICATION; MICROMACHINING; TUNGSTEN;

ELECTROCHEMICAL CORROSION;

EID: 33747431866     PISSN: 05776686     EISSN: None     Source Type: Journal    
DOI: 10.3901/JME.2006.06.128     Document Type: Article

References (7)

1. LI Y, ZHENG Y F, YANG G, et al. Localized electrochemical micro machining with gap control[J]. Sensors and Actuators A, 2003, 108(15): 144-148.
2. MASUZAWA T, KUO C L, FUJINU M. A combined electrical machining process for micro nozzles fabrication[J]. Annals of the CIRP, 1994, 43: 189-192.
3. LIM Y M, KIM S H. An electrochemical fabrication method foe extremely thin cylindrical micropin[J]. International Journal of Machine tools and Manufacture, 2001, 41: 2287-2296.
4. LIM Y M, LIM H J, LIU J R. Fabrication of cylindrical micro pins with various diameters using DC current density control[J]. Journal of Materials Processing Technology, 2003, 141: 251-255.