A micro shear stress sensor based on laterally aligned carbon nanotubes

Sensors and Actuators, A: Physical

Volumn 133, Issue 2 SPEC. ISS., 2007, Pages 431-438

  Tung, Steve ^a   Rokadia, Husein ^a   Li, Wen J ^b  

^a 3202 Bell Engineering Center   (United States)

^b CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Carbon nanotubes; Dielectrophoresis; Lateral alignment; Shear stress sensor

Indexed keywords

BROWNIAN MOVEMENT; CARBON NANOTUBES; COMPUTER SIMULATION; HEAT CONVECTION; MICROELECTRODES; SHEAR STRESS;

DIELECTROPHORESIS; LATERAL ALIGNMENT; SHEAR STRESS SENSORS;

SENSORS;

EID: 33846534710     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.04.039     Document Type: Article

References (22)

1. Ho C.M., and Tai Y.C. Micro-electro-mechanical-systems (MEMS) and fluid flows. Annu. Rev. Fluid Mech. 30 (1998) 579-612
2. Liu C., Huang J.-B., Zhu A.Z., Jiang F., Tung S., Tai Y.-C., and Ho C.-M. A Micromachined flow shear stress sensor based on thermal transfer priciples. J. Microelectromech. Syst. 8 (1999) 90-99
3. Goldstein R.J. Fluid Mechanics Measurements (1983), Hemisphere Publishing Corp., New York p. 161
4. Huang J., Tung S., Ho C.M., Liu C., and Tai Y.C. Improved micro thermal shear-stress sensor. IEEE Trans. Instrum. Meas. 45 (1996) 570-574
5. Tung S., Maines B., Jiang F., and Tsao T. Development of a MEMS-based control system for compressible flow separation. J. Microelectromech. Syst. 13 (2004) 91-99
6. Xu Y., Clendenin J., Tung S., Jiang F., and Tai Y.-C. Underwater flexible shear stress sensor skins. Proceedings of IEEE International MEMS-04 Conference. Maastricht, Netherlands, January 25-29 (2004)
7. Soundararajan G., Hsiai T.K., DeMaio L., Chang M., and Chang S. MEMS shear stress sensor for cardiovascular diagnostics. Proceedings of the 26th Annual International Conference of the IEEE EMBS. San Francisco, CA, September 1-5 (2004)
8. K. Breuer, MEMS Sensors for Aerodynamic Applications, Proceedings of the 38th Aerospace Sciences Meeting & Exhibit, AIAA paper 2000-0251, Reno, NV, January 10, 13, 2000.
9. Kane C.L., and Mele E.J. Size, shape, and low energy electronic structure of carbon nanotubes. Phys. Rev. Lett. 78 (1997) 1932-1935
10. Clendenin J., Rokadia H., Tung S., and Ogburia K. Application of aligned carbon nanotubes in micro shear stress sensing. Proceedings of the International Mechanical Engineering Congress and RD&D Expo, IMECE2004-61227. Anaheim, CA, November 13-19 (2004)
11. Fung C.K., Wong V., Chan R., and Li W.J. Dielectrophoretic Batch Fabrication of Bundled Carbon Nanotube Thermal Sensors. IEEE Trans. Nanotechnol. 3 (2004) 395-403
12. Saito R., Dresselhaus G., and Dresselhaus M.S. Physical Properties of Carbon Nanotubes (1999), Imperial College Press, London p. 150
13. Grimes C.A., Dickey C.E.C., Mungle C., Ong K.G., and Qian D. Effect of purification of the electrical conductivity and complex permittivity of multi wall carbon nanotubes. J. Appl. Phys. 90 (2001) 4134-4137
14. Ren Z., Huang Z., Xu J., Wang J., Bush P., Siegal M., and Provencio P. Synthesis of large arrays of well-aligned carbon nanotubes on glass. Science 282 (1998) 1105-1107
15. Dimaki M., and Boggild P. Dielectrophoresis of carbon nanotubes using microelectrodes: a numerical study. Nanotechnology 15 (2004) 1-8
16. Ramos A., Morgan H., Green N., and Castellanos A. AC electrokinetics: a review of forces in microelectrode structures. J. Phys. D: Appl. Phys. 31 (1998) 2338-2353
17. Chung J., Lee K.-H., and Lee J. Microfabricated glucose sensor based on single-walled carbon nanotubes. Proceedings of IEEE International MEMS-04 Conference. Maastricht, Netherlands, January 25-29 (2004)
18. White F.M. Viscous Fluid Flow (1991), New York, McGraw Hill p. 280
19. Pohl H.A. Dielectrophoresis (1978), Cambridge University Press, Cambridge, UK p. 171
20. White F.M. Viscous Fluid Flow (1991), McGraw Hill, New York p. 200
21. Clendenin J., Gordon M., and Tung S. Pressure sensitivity of a thermal shear stress sensor. Proceedings of FEDSM'03 4TH ASME-JSME Joint Fluids Engineering Conference. Honolulu, HI, July 6-11 (2003)
22. Xu Y., Tai Y.-C., Jiang F., Lin Q., Clendenin J., and Tung S. Underwater shear stress sensor. Proceedings of IEEE International MEMS-02 Conference. Las Vegas, NV, January 20-24 (2002)