Ionized hollow cathode magnetron sputtering

Thin Films

Volumn 27, Issue C, 2000, Pages 95-139

  Lai, Kwok F ^a  

^a Novellus Systems   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 77957051927     PISSN: 10794050     EISSN: None     Source Type: Book Series    
DOI: 10.1016/S1079-4050(00)80007-1     Document Type: Article

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