Shape effect of silicon nitride subwavelength structure on reflectance for silicon solar cells

IEEE Transactions on Electron Devices

Volumn 57, Issue 10, 2010, Pages 2427-2433

  Sahoo, Kartika Chandra ^a   Li, Yiming ^a,b   Chang, Edward Yi ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

Author keywords

Antireflection coating (ARC); efficiency; morphological effect; multilayer; reflectance; rigorous coupled wave approach; shape effect; silicon nitride; subwavelength structure (SWS)

Indexed keywords

MORPHOLOGICAL EFFECT; REFLECTANCE; RIGOROUS COUPLED-WAVE; SHAPE EFFECT; SUBWAVELENGTH STRUCTURES;

ANTIREFLECTION COATINGS; COATINGS; CYLINDERS (SHAPES); MULTILAYERS; OPTIMIZATION; REACTIVE ION ETCHING; REFLECTION; SILICON NITRIDE; SILICON SOLAR CELLS; SOLAR CELLS; SPACECRAFT;

SILICON;

EID: 77957015789     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2010.2056150     Document Type: Article

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