SCOPUS 정보 검색 플랫폼

Volumn 85, Issue 2, 2010, Pages 145-150

Impact of substrate temperature on the microstructure, electrical and optical properties of sputtered nanoparticle V2O5 thin films

(6) Luo, Zhenfei a Wu, Zhiming a Xu, Xiangdong a Du, Mingjun a Wang, Tao a Jiang, Yadong a

a UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA (China)

Author keywords

DC magnetron sputtering; Electrical and optical properties; Microstructure; Substrate temperature; Vanadium pentoxide thin films

Indexed keywords

ATOMIC FORCE MICROSCOPES; DC MAGNETRON SPUTTERING; DIFFERENT SUBSTRATES; DIRECT CURRENT MAGNETRON SPUTTERING; ELECTRICAL AND OPTICAL PROPERTIES; ELECTRICAL MEASUREMENT; FOURIER TRANSFORM INFRARED SPECTROPHOTOMETERS; GLASS SLIDES; INFRARED SPECTRUM; NEAR INFRARED; NEAR-INFRARED RANGE; OPTICAL INVESTIGATION; OXYGEN BONDS; REFLECTION SPECTRA; SEMICONDUCTING BEHAVIOR; SQUARE RESISTANCE; SUBSTRATE TEMPERATURE; VANADIUM PENTOXIDE THIN FILMS; VISIBLE RANGE;

ATOMIC SPECTROSCOPY; DC POWER TRANSMISSION; ELECTRIC PROPERTIES; FILM GROWTH; FOURIER TRANSFORMS; INFRARED DEVICES; MAGNETRON SPUTTERING; MICROSTRUCTURE; NANOPARTICLES; OXYGEN; REFRACTIVE INDEX; SEMICONDUCTING FILMS; SEMICONDUCTOR GROWTH; THIN FILMS; VANADIUM; VANADIUM ALLOYS; VANADIUM COMPOUNDS; VAPOR DEPOSITION; X RAY PHOTOELECTRON SPECTROSCOPY;

SUBSTRATES;

EID: 77956617747 PISSN: 0042207X EISSN: None Source Type: Journal
DOI: 10.1016/j.vacuum.2010.05.001 Document Type: Article

Times cited : (43)

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