Micro-and nanoprocessing of polymers using a laser plasma extreme ultraviolet source

Acta Physica Polonica A

Volumn 117, Issue 2, 2010, Pages 384-390

  Bartnik, A ^a   Fiedorowicz, H ^a   Jarocki, R ^a   Kostecki, J ^a   Rakowski, R ^a   Szczurek, A ^a   Szczurek, M ^a  

^a MILITARY UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; EXTREME ULTRAVIOLET LITHOGRAPHY; IRRADIATION; LASER BEAMS; LASER PRODUCED PLASMAS; LIGHT SOURCES; ORGANIC LASERS; PLASMA INTERACTIONS; SURFACE TREATMENT; ULTRAVIOLET DEVICES; ULTRAVIOLET LASERS;

DIRECT PHOTO-ETCHING; EXTREME ULTRAVIOLET SOURCES; EXTREME ULTRAVIOLETS; GAS PUFF TARGETS; GRAZING INCIDENCE COLLECTORS; IRRADIATION CONDITIONS; MICRO AND NANOSTRUCTURES; PATTERN STRUCTURE;

ORGANIC POLYMERS;

EID: 77956520672     PISSN: 05874246     EISSN: 1898794X     Source Type: Journal    
DOI: 10.12693/APhysPolA.117.384     Document Type: Conference Paper

References (16)

1. Y. Zhang, T. Katoh, M. Washio, H. Yamada, S. Hamada, Appl. Phys. Lett. 67, 872 (1995).
2. H. Fiedorowicz, A. Bartnik, L. Juha, K. Jungwirth, B. Králiková, J. Krása, P. Kubat, M. Pfeifer, L. Pína, P. Prchal, K. Rohlena, J. Skála, J. Ullschmied, M. Horvath, J. Wawer, J. All. Compd. 362, 67 (2004).
3. H. Fiedorowicz, A. Bartnik, M. Bittner, L. Juha, J. Krasa, P. Kubat, J. Mikołajczyk, R. Rakowski, Micr. Eng. 73-74, 336 (2004).
4. L. Juha, J. Krása, A. Cejnarová, D. Chvostová, V. Vorlicek, J. Krzywinski, R. Sobierajski, A. Andrejczuk, M. Jurek, D. Klinger, H. Fiedorowicz, A. Bartnik, M. Pfeifer, P. Kubat, L. Pina, J. Kravárik, P. Kubei, Y.L. Bakshaev, V.D. Korolev, A.S. Chernenko, M.I. Ivanov, M. Scholz, L. Ryc, J. Feldhaus, J. Ullschmied, F.P. Boody, Nucl. Instr. Meth. A 507, 577 (2003).
5. A. Bartnik, H. Fiedorowicz, R. Jarocki, L. Juha, J. Kostecki, R. Rakowski, M. Szczurek, Micr. Eng. 78-79, 452 (2005).
6. T. Makimura, Y. Kenmotsu, H. Miyamoto, H. Niino, K. Murakami, Surf. Sci. 593, 248 (2005).
7. Y. Wan, Y. Wang, Z. Liu, X. Qu, B. Han, J. Bei, S. Wang, Biomaterials 26, 4453 (2005).
8. E.K.F. Yim, R.M. Reano, S.W. Pang, A.F. Yee, C.S. Chen, K.W. Leong, Biomaterials 26, 5405 (2005).
9. E. Rebollar, I. Frischauf, M. Olbrich, T. Peterbauer, S. Hering, J. Preiner, P. Hinterdorfer, C. Romanin, J. Heitz, Biomaterials 29, 1796 (2008).
10. T. Gumpenberger, J. Heitz, D. Bauerle, H. Kahr, I. Graz, C. Romanin, V. Svorcik, F. Leisch, Biomaterials 24, 5139 (2003).
11. V. Svorcik, K. Rockova, E. Ratajova, J. Heitz, N. Huber, D. Bauerle, L. Bacakova, B. Dvorankova, V. Hnatowicz, Nucl. Instrum. Meth. Phys. Research B 217, 307 (2004).
12. A. Bartnik, H. Fiedorowicz, R. Jarocki, J. Kostecki, J. Mikołajczyk, R. Rakowski, M. Szczurek, in: Proc. SPIE, Vol. 5037, Eds. R.L. Engelstad, SPIE Press, Bellingham 2003.
13. H. Fiedorowicz, A. Bartnik, R. Jarocki, R. Rakowski, M. Szczurek, Appl. Phys. B 70, 305 (2000).
14. A. Bartnik, H. Fiedorowicz, R. Jarocki, L. Juha, J. Kostecki, R. Rakowski, M. Szczurek, Appl. Phys. B 82 529 (2006).
15. T. Lippert, Adv. Polym. Sci. 168, 51 (2004).
16. B. Hopp, Zs. Bor, E. Homolya, E. Mihalik, Appl. Surf. Sci. 109/110, 232 (1997).