Patterning crystalline indium tin oxide by high repetition rate femtosecond laser-induced crystallization

Thin Solid Films

Volumn 518, Issue 23, 2010, Pages 7138-7142

  Cheng, Chung Wei ^a   Lin, Cen Y Ing ^a   Shen, Wei Chih ^a   Lee, Yi Ju ^b   Chen, Jenq Shyong ^b  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^b NATIONAL CHUNG CHENG UNIVERSITY   (Taiwan)

Author keywords

Femtosecond laser; Inidum tin oxide; Laser crystallization; Patterning; Scanning electron microscopy; Transmission electron microscopy; X ray diffraction

Indexed keywords

FEMTO-SECOND LASER; INIDUM TIN OXIDE; LASER CRYSTALLIZATION; PATTERNING; SCANNING ELECTRONS; TRANSMISSION ELECTRON;

AMORPHOUS FILMS; CRYSTALLINE MATERIALS; CRYSTALLIZATION; DIFFRACTION; ELECTRIC PROPERTIES; ELECTRONS; INDIUM; INDIUM COMPOUNDS; OXIDE FILMS; PHOTOLITHOGRAPHY; PULSED LASER APPLICATIONS; SCANNING; SCANNING ELECTRON MICROSCOPY; SURFACE PROPERTIES; TIN; TIN OXIDES; TITANIUM COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY; ULTRASHORT PULSES; X RAY DIFFRACTION; X RAYS;

ITO GLASS;

EID: 77956231755     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2010.07.025     Document Type: Article

References (16)

1. H. Morikawa, and M. Fujita Thin Solid Films 359 2000 61
2. O. Yavas, and M. Takai J. Appl. Phys. 85 1999 4207
3. C. Molpeceres, S. Lauzurica, J.L. Ocaña, J.J. Gandía, L. Urbina, and J. Cárabe J. Micromech. Microeng. 15 2005 1271
4. N. Fukuda International Congress on Applications of Lasers & Electro-Optics, USA 2006
5. M.Y. Xu, J. Li, L.D. Lilge, and P.R. Herman Appl. Phys. A 85 2006 7
6. S.J. Kwon Jpn. J. Appl. Phys. 47 2008 9403
7. Z.H. Li, E.S. Cho, and S.J. Kwon Appl. Surf. Sci. 255 2009 9843
8. M.F. Chen, W.T. Hsiao, Y.S. Ho, S.F. Tseng, and Y.P. Chen Thin Solid Films 518 2009 1072
9. D. Ashkenasi, G. Müller, A. Rosenfeld, R. Stoian, I.V. Hertel, N.M. Bulgakova, and E.E.B. Campbell Appl. Phys. A 77 2003 223
10. R. Tanaka, T. Takaoka, H. Mizukami, T. Arai, and Y. Iwai Proc. SPIE 5063 2003 370
11. I.B. Sohn, S.C. Choi, Y.C. Noh, D.K. Ko, and J. Lee 4th International Congress on Laser Advanced Materials Processing, Koyto, Japan 2006
12. G. Račiukaitis, M. Brikas, M. Gedvilas, and G. Darčianovas J Laser Micro/Nanoeng. 2 2007 1
13. G. Legeay, X. Castel, R. Benzerga, and J. Pinel Phys. Status Solidi (c) 5 2008 3248
14. H. Hosono, M. Kurita, and H. Kawazoe Jpn. J. Appl. Phys. 37 1998 1119
15. R.R. Gattass, G.T. Svacha, L. Tong, and E. Mazur Opt. Express 14 2006 5279
16. S. Juodkazis, H. Misawa, and I. Maksimov Appl. Phys. Lett. 85 2004 5239