Excimer laser crystallization of amorphous indium-tin-oxide and its application to fine patterning

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 37, Issue 10 PART A, 1998, Pages

  Hosono, Hideo ^a   Kurita, Masaaki ^a   Kawazoe, Hiroshi ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Amorphous ITO; Crystallization; Excimer lasers; Indium tin oxide; Patterning

Indexed keywords

AMORPHOUS FILMS; ATOMIC FORCE MICROSCOPY; CRYSTAL STRUCTURE; CRYSTALLIZATION; ELECTRIC CONDUCTIVITY MEASUREMENT; ETCHING; EXCIMER LASERS; FILM PREPARATION; LASER PULSES; MORPHOLOGY; X RAY DIFFRACTION ANALYSIS;

FINE PATTERNING; INDIUM TIN OXIDE;

SEMICONDUCTING INDIUM COMPOUNDS;

EID: 0032180577     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.l1119     Document Type: Article

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