Laser patterning with beam shaping on indium tin oxide thin films of glass/plastic substrate

Thin Solid Films

Volumn 518, Issue 4, 2009, Pages 1072-1078

  Chen, Ming Fei ^a   Hsiao, Wen Tse ^a   Ho, Yu Sen ^a   Tseng, Shih Feng ^b   Chen, Yu Pin ^c  

^a NATIONAL CHANGHUA UNIVERSITY OF EDUCATION   (Taiwan)

^b INSTRUMENT TECHNOLOGY RESEARCH CENTER   (Taiwan)

^c Tongtai Machine and Tool Co Ltd   (Taiwan)

Author keywords

Beam shaper component; Electrode patterning; Indium tin oxide; Top hat intensity distribution

Indexed keywords

BEAM SHAPER COMPONENT; BEAM SHAPERS; BEAM-SHAPING; INDIUM THIN OXIDES; INDIUM TIN OXIDE; INDIUM TIN OXIDE THIN FILMS; INTENSITY DISTRIBUTION; ITO FILMS; ITO THIN FILMS; LASER OUTPUT POWER; LASER PATTERNING; ND : YAG LASERS; OPTICAL MICROSCOPES; PLASTIC SUBSTRATES; PROCESSING PARAMETERS; PULSE DURATIONS; PULSE REPETITION RATES; SCANNING ELECTRON MICROSCOPE; SCANNING SPEED; STRAIGHT LINES; THIRD HARMONIC;

INDIUM; LASER BEAMS; LASERS; MICROSCOPES; OPTICAL PROPERTIES; OXIDE FILMS; PHOTOLITHOGRAPHY; PULSED LASER APPLICATIONS; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; SURFACE PROPERTIES; THIN FILMS; TIN;

NEODYMIUM LASERS;

EID: 71649093018     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.06.063     Document Type: Article

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