Preparation of Magnéli phases of Ti27O52 and Ti6O11 films by laser chemical vapor deposition

Thin Solid Films

Volumn 518, Issue 23, 2010, Pages 6927-6932

  Tu, Rong ^a   Huo, Guangsheng ^a   Kimura, Teiichi ^a   Goto, Takashi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Laser chemical vapor deposition; Magn li phase; Titanium oxide; Transmission electron microscopy; X ray diffraction

Indexed keywords

CROSS SECTION; DEPOSITION TEMPERATURES; GRAIN SIZE; LASER CHEMICAL VAPOR DEPOSITION; LASER POWER; TRANSMISSION ELECTRON;

CHEMICAL VAPOR DEPOSITION; DEPOSITION; DIFFRACTION; FILM PREPARATION; TITANIUM; TITANIUM OXIDES; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

LASER CHEMISTRY;

EID: 77956231480     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2010.07.050     Document Type: Article

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