AFM based polarization nanolithography on PZT sol-gel films

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1456-1459

  Snitka, Valentinas ^a   Ulcinas, Arturas ^a   Nemciauskas, Kestutis ^a   Lendraitis, Vitas ^a  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

Author keywords

Atomic force microscopy; Ferroelectric; Nanolithography; Sol gel

Indexed keywords

ATOMIC FORCE MICROSCOPY; FERROELECTRIC MATERIALS; PIEZOELECTRICITY; SOL-GELS; SURFACE PROPERTIES; THIN FILMS; VIBRATIONS (MECHANICAL);

(PZT) THIN FILMS; FERROELECTRIC; MICROFABRICATED LENS ARRAY;

LITHOGRAPHY;

EID: 33646023181     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.249     Document Type: Article

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