The effect of post-deposition cooling rate on the orientation of piezoelectric (Pb0.92Sr0.08)(Zr0.65Ti 0.35)O3 thin films deposited by RF magnetron sputtering

Semiconductor Science and Technology

Volumn 21, Issue 9, 2006, Pages 1236-1243

  Sriram, S ^a   Bhaskaran, M ^a   Holland, A S ^a  

^a RMIT UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; DIFFRACTION; LEAD COMPOUNDS; PIEZOELECTRIC MATERIALS; THIN FILMS;

DIFFRACTION PEAK PATTERNS; LEAD ZIRCONATE TITANATE (PSZT); MICROSYSTEM DEVICES; POST-DEPOSITION COOLING;

COOLING;

EID: 33747264506     PISSN: 02681242     EISSN: 13616641     Source Type: Journal    
DOI: 10.1088/0268-1242/21/9/005     Document Type: Article

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