Rapid fabrication of lightweight SiC aspheres using reactive atom plasma (RAP™) processing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6666, Issue , 2007, Pages

  Subrahmanyan, Pradeep ^a   Gardopee, George ^a   Verma, Yogesh ^a   Ning, Li ^a   Tom, Yu ^a   Kyler, Thomas ^a   Fiske, Peter ^a   Sommer, Philip ^a  

^a RAPT Industries Inc   (United States)

Author keywords

Asphere fabrication; RAP; Reactive atom plasma; Silicon carbide; Sub surface damage

Indexed keywords

ASPECT RATIO; LIGHT WEIGHT STRUCTURES; PLASMAS; SILICON CARBIDE; STRAIN ENERGY; SURFACE ROUGHNESS;

ASPHERE FABRICATION; MATERIAL REMOVAL RATE; REACTIVE ATOM PLASMA (RAP); SUB-SURFACE DAMAGE;

ASPHERICS;

EID: 42149131426     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.733123     Document Type: Conference Paper

References (3)

1. Preston, F. W., 1921, The structure of abraded glass surfaces, Trans. Opt. Soc. v. 23, 141-164.
2. Verma, Y., Fiske, P.S., Chang, A. K., Barrett, J. W., Futtere, K., Gardopee, G. J., Kelly, J., Kyler, T., Lee, J., Lyford, N., Proscia, D., Sommer, P. S., and Subrahmanyan, P. K., 2006, Proceedings of SPIE, Astronomical Telescopes and Instrumentation, 2006.
3. Johnson, J. S., Grobsky, K., and Bray, D. J., 2002, Rapid fabrication of lightweight silicon carbide mirrors, in Optomechanical Design and Engineering 2002 (A. E. Hathaway, ed.), Proceedings of SPIE v. 4771, p. 243-253.