Performance characteristics of a MEMS quadrupole mass filter with square electrodes: Experimental and simulated results

IEEE Transactions on Instrumentation and Measurement

Volumn 59, Issue 9, 2010, Pages 2458-2467

  Hogan, Thomas J ^a   Taylor, Stephen ^a   Cheung, Kerry ^b   Velásquez García, Luis Fernando ^b   Akinwande, Akintunde Ibitayo ^b   Pedder, Randall E ^c  

^a UNIVERSITY OF LIVERPOOL   (United Kingdom)

^b MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^c Ardara Technologies LP   (United States)

Author keywords

Microelectromechanical; multipoles; quadrupole mass filter; square electrode; zone 3

Indexed keywords

MICRO-ELECTRO-MECHANICAL; MULTIPOLES; QUADRUPOLE MASS FILTERS; SQUARE ELECTRODE; ZONE 3;

COMPOSITE MICROMECHANICS; COMPUTER SIMULATION; MASS SPECTROMETRY; MEMS; MICROELECTROMECHANICAL DEVICES; SIZE DETERMINATION; SPACE RESEARCH;

ELECTRODES;

EID: 77955711048     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIM.2009.2036346     Document Type: Article

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