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Volumn 518, Issue 19, 2010, Pages 5553-5557

Low friction CrN/TiN multilayer coatings prepared by a hybrid high power impulse magnetron sputtering/DC magnetron sputtering deposition technique

(5) Paulitsch, J a Schenkel, M b Schintlmeister, A c Hutter, H c Mayrhofer, P H d

a MATERIALS CENTER LEOBEN FORSCHUNG GMBH (Austria)

b Systec SVS Vacuum Coating Technologies (Germany)

c VIENNA UNIVERSITY OF TECHNOLOGY (Austria)

d UNIVERSITY OF LEOBEN (Austria)

Author keywords

BOD; HPPMS; Low friction coefficient; TiN CrN; Wear resistance

Indexed keywords

AS-DEPOSITED FILMS; BILAYER PERIOD; BOD; CONSTANT HARDNESS; DC MAGNETRON SPUTTERING; DISTILLED WATER; DROPLET FORMATION; FRICTION COEFFICIENTS; HIGH POWER IMPULSE MAGNETRON SPUTTERING; HIGH-POWER; HPPMS; INDUSTRIAL REQUIREMENTS; LAYER THICKNESS; LOW FRICTION; LOW FRICTION COEFFICIENTS; MAGNETRON-SPUTTERING DEPOSITION; MULTI-LAYER-COATING; MULTILAYERED COATINGS; ROOM TEMPERATURE; SUBSTRATE ROTATION; TARGET MATERIALS; TIN/CRN; UNIFORM DEPOSITION;

ANGLE MEASUREMENT; CHROMIUM; COATINGS; CONTACT ANGLE; DC POWER TRANSMISSION; DROP FORMATION; MAGNETRON SPUTTERING; PLASMA DENSITY; TITANIUM NITRIDE; TRIBOLOGY; WEAR RESISTANCE;

FRICTION;

EID: 77955656434 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2010.05.061 Document Type: Article

Times cited : (45)

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