Fluorine-doped ZnO transparent conducting thin films prepared by radio frequency magnetron sputtering

Thin Solid Films

Volumn 518, Issue 17, 2010, Pages 4955-4959

  Tsai, Yu Zen ^a   Wang, Na Fu ^a   Tsai, Chun Lung ^a  

^a CHENG SHIU UNIVERSITY   (Taiwan)

Author keywords

Deposition; Fluorine doped ZnO; Sputtering; Thin films

Indexed keywords

DIFFRACTION LINES; DOPED ZNO; ENERGY BANDGAPS; FLUORINE-DOPED ZNO; GLASS SUBSTRATES; GRAIN SIZE; OPTICAL AND ELECTRICAL PROPERTIES; PREFERENTIAL GROWTH; RADIO FREQUENCY MAGNETRON SPUTTERING; THERMAL-ANNEALING; VISIBLE REGION; X-RAY PATTERNS;

ANNEALING; CARRIER CONCENTRATION; CONDUCTIVE FILMS; DEPOSITION; ELECTRIC PROPERTIES; FLUORINE; METALLIC FILMS; OPTICAL FILMS; RADIO; RADIO WAVES; SUBSTRATES; THIN FILMS; VAPOR DEPOSITION; ZINC OXIDE;

FILM PREPARATION;

EID: 77955654986     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2010.03.086     Document Type: Article

References (20)

1. D.P. Norton, Y.W. Heo, M.P. Ivill, K. Ip, S.J. Pearton, M.F. Chisholm, and T. Steiner Mater. Today 7 2004 34
2. S. Major, S. Kumar, M. Bhatnagar, and K.L. Chopra Appl. Phys. Lett. 49 1986 394
3. C. Beneking, B. Rech, S. Wieder, O. Kluth, H. Wagner, W. Frammelsberger, R. Geyer, P. Lechner, H. Rübel, and H. Schade Thin Solid Films 351 1999 241
4. K. Ramamoorthy, K. Kumar, R. Chandramohan, and K. Sankaranarayanan Mater. Sci. Eng. B 126 2006 1
5. T. Minami Thin Solid Films 516 2008 5822
6. P.M. Ratheesh Kumar, C. Sudha Kartha, K.P. Vijayakumar, F. Singh, and D.K. Avasthi Mater. Sci. Eng. B 117 2005 307
7. J. Rodríguez-Báez, A. Maldonado, L. Castañeda, G. Torres Delgado, R. Castanedo-Pérez, and M. de la L. Olvera Thin Solid Films 515 2007 8689
8. J. Hu, and R.G. Gordon Sol. Cells 30 1991 437
9. T. Miyata, S. Ida, and T. Minami J. Vac. Sci. Technol. A 21 2003 1404
10. B.G. Choi, I.H. Kim, D.H. Kim, K.S. Lee, T.S. Lee, B. Cheong, Y.J. Baik, and W.M. Kim J. Eur. Ceram. Soc. 25 2005 2161
11. J. Lu, Y. Zhang, Z. Ye, L. Wang, B. Zhao, and J. Huang Mater. Lett. 57 2003 3311
12. F. Yakuphanoglu, Y. Caglar, S. Ilican, and M. Caglar Physica B 394 2007 86
13. Y. Nakanishi, S. Naito, T. Nakamura, Y. Hatanaka, and G. Shimaoka Appl. Surf. Sci. 92 1996 400
14. J.M. Ting, and B.S. Tsai Mater. Chem. Phys. 72 2001 273
15. V. Gupta, and A. Mansingh J. Appl. Phys. 80 1996 1063
16. B.D. Cullity Elements of X-ray Diffraction 1978 Addison-Wesley Reading, MA
17. E. Fortunato, P. Barquinha, A. Pimentel, A. Goncalves, A. Marques, L. Pereira, and R. Martins Thin Solid Films 487 2005 205
18. E. Burstein Phys. Rev. 93 1954 632
19. T.S. Moss Phys. Soc. Lond. B 67 1954 775
20. A. Ables Optical Properties of Solids 1992 North Holland Amsterdam