Properties of W doped diamond-like carbon films prepared by pulsed laser deposition

Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering

Volumn 39, Issue 7, 2010, Pages 1251-1255

  Wang, Xuemin ^a   Wu, Weidong ^a   Li, Shengyin ^b   Chen, Songlin ^a   Tang, Yongjian ^a   Bai, Li ^b   Wang, Haiping ^b  

^a RESEARCH CENTER OF LASER FUSION   (China)

^b SICHUAN UNIVERSITY   (China)

Author keywords

Diamond like carbon film (DLC); Hardness; Pulsed laser deposition

Indexed keywords

AFM; DOPED DIAMOND-LIKE CARBON; NANOINDENTERS; PULSED EXCIMER LASERS; PULSED LASER; RAMAN SPECTRA; SI SUBSTRATES; W-DOPING; XRD;

DIAMOND LIKE CARBON FILMS; DIAMONDS; DOPING (ADDITIVES); EXCIMER LASERS; FILM PREPARATION; GAS LASERS; HARDNESS; KRYPTON; PULSED LASER DEPOSITION; PULSED LASERS; RAMAN SPECTROSCOPY; SURFACE MORPHOLOGY; SURFACE ROUGHNESS;

CARBON FILMS;

EID: 77955611241     PISSN: 1002185X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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