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Volumn 45, Issue 9, 2010, Pages 1203-1208
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Synthesis, crystal structure and thermal decomposition of [La 2(CH3CH2COO)6·(H 2O)3]·3.5H2O precursor for high-k La2O3 thin films deposition
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Author keywords
A. Thin films; B. Chemical synthesis; C. Thermogravimetric analysis (TGA); C. X ray diffraction; D. Crystal structure
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Indexed keywords
ACETYLACETONATES;
C. X-RAY DIFFRACTION;
CHEMICAL SYNTHESIS;
COATING SOLUTION;
COMPLEX NATURE;
D. CRYSTAL STRUCTURE;
FOURIER TRANSFORMED INFRARED SPECTROSCOPY;
FTIR;
HEXAGONAL PHASE;
LATTICE PARAMETERS;
POLYCRYSTALLINE;
PRECURSOR CHEMISTRY;
PRECURSOR POWDER;
PRECURSOR SOLUTIONS;
QUADRUPOLE MASS SPECTROMETRY;
SI (1 1 1);
SINGLE CRYSTALLINE SUBSTRATES;
THERMAL DECOMPOSITIONS;
THIN FILMS DEPOSITION;
ANODIC OXIDATION;
CHEMICAL ANALYSIS;
COATINGS;
COMPLEXATION;
CRYSTAL STRUCTURE;
DEPOSITION;
DIFFERENTIAL THERMAL ANALYSIS;
FILM PREPARATION;
INFRARED SPECTROSCOPY;
LANTHANUM ALLOYS;
MASS SPECTROMETRY;
PYROLYSIS;
SEMICONDUCTING SILICON COMPOUNDS;
SINGLE CRYSTALS;
SUBSTRATES;
SYNTHESIS (CHEMICAL);
THERMOGRAVIMETRIC ANALYSIS;
THIN FILMS;
VAPOR DEPOSITION;
X RAY DIFFRACTION;
X RAY DIFFRACTION ANALYSIS;
X RAYS;
LANTHANUM;
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EID: 77955559881
PISSN: 00255408
EISSN: None
Source Type: Journal
DOI: 10.1016/j.materresbull.2010.05.019 Document Type: Article |
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Times cited : (24)
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References (17)
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