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Volumn 517, Issue 5, 2009, Pages 1677-1680

Anomalous phase formation during annealing of La2O3 thin films deposited by ion beam assisted electron beam evaporation

(5) Yang, Chen a Fan, Huiqing a Xi, Yingxue a Qiu, Shaojun b Fu, Yunfei a

a NORTHWESTERN POLYTECHNICAL UNIVERSITY (China)

b XI'AN MODERN CHEMISTRY RESEARCH INSTITUTE (China)

Author keywords

Electrical properties; Electron beam evaporation; Film structure; Heterogeneous nucleation; La2O3 thin films; Optical properties

Indexed keywords

ELECTRIC PROPERTIES; ELECTRON BEAMS; ELECTRON GUNS; EVAPORATION; LANTHANUM; MOISTURE; NUCLEATION; OPTICAL PROPERTIES; PARTICLE BEAMS; REFRACTIVE INDEX; SEMICONDUCTING SILICON COMPOUNDS; SILICON; SOLIDS; THICK FILMS; THIN FILMS; VAPORS;

ELECTRICAL PROPERTIES; ELECTRON BEAM EVAPORATION; FILM STRUCTURE; HETEROGENEOUS NUCLEATION; LA2O3 THIN FILMS;

AMORPHOUS FILMS;

EID: 56949107585 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2008.09.069 Document Type: Article

Times cited : (16)

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