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Volumn 87, Issue 9, 2010, Pages 1661-1664
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A study of the interaction of gallium arsenide with wet chemical formulations using thermodynamic calculations and spectroscopic ellipsometry
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Author keywords
GaAs; Pourbaix diagram; Spectroscopic ellipsometry
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Indexed keywords
ACIDIC SOLUTIONS;
AMMONIUM HYDROXIDE SOLUTION;
AQUEOUS SOLUTIONS;
ARSENIC OXIDE;
ELLIPSOMETRIC DATA;
FERMI LEVEL PINNING;
GAAS;
GAAS SURFACES;
NATIVE OXIDE LAYER;
POURBAIX DIAGRAM;
SOLUBILITY RANGE;
STABLE SURFACE LAYER;
STABLE SURFACES;
SURFACE OXIDE LAYER;
SURFACE STATE;
THERMODYNAMIC CALCULATIONS;
WATER RINSING;
WET CHEMICAL TREATMENT;
WET CHEMICALS;
AMMONIUM COMPOUNDS;
ARSENIC;
DEIONIZED WATER;
GALLIUM ALLOYS;
HYDROCHLORIC ACID;
SEMICONDUCTING GALLIUM;
SPECTROSCOPIC ELLIPSOMETRY;
SURFACE DEFECTS;
THERMODYNAMICS;
GALLIUM ARSENIDE;
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EID: 77955228666
PISSN: 01679317
EISSN: None
Source Type: Journal
DOI: 10.1016/j.mee.2009.11.046 Document Type: Conference Paper |
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Times cited : (10)
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References (18)
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