Active damping control of micromachined devices in a low atmospheric pressure environment

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6928, Issue , 2008, Pages

  Kim, Seong Jin ^a   Chen, Chen ^a   Flowers, George ^a   Dean, Robert ^a  

^a AUBURN UNIVERSITY   (United States)

Author keywords

Damping; Filter; Isolation; Micromachined; Vibration

Indexed keywords

MICROMACHINED VIBRATION; PASSIVE FILTER STRUCTURE;

ATMOSPHERIC PRESSURE; LOW PASS FILTERS; MICROMACHINING; VIBRATION ANALYSIS;

DAMPING;

EID: 44449151158     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.777190     Document Type: Conference Paper

References (16)

1. D. S. Steinberg, Vibration Analysis for Electronic Equipment, pp. 10-16, John Wiley & Sons, Inc., New York, 2000.
2. R. Dean, G. Flowers, S. Hodel, K. MacAllister, R. Horvath, A. Matras, G. Robertson, R. Glover, "Vibration Isolation of MEMS Sensors for Aerospace Applications," Proc. of IMAPS International Conference and Exhibition on Advanced Packaging and Systems, Reno, NV, pp. 166-170, March 10-13, 2002.
3. V. T. Srikar and S. D. Senturia, "The Reliability of Micromechanical Systems (MEMS) in Shock Environment," J. of Micromechanical Systems, Vol. 11, Issue 3, pp. 206-214, June 2002.
4. J.R. Reid, V. M. Bright and J. A. Korinski, "A Micromachined Vibration Isolation System for Reducing the Vibration Sensitivity of Surface Transverse Wave Resonators", IEEE. Tran. Ultrasonics, Ferro. And Freq. Cntrl. Vol. 45 No. 2, pp. 528-534, March 1998.
5. J.R. Reid, V. M. Bright, J. T. Stewart and J. A. Kosinski, "Reducing the Normal Acceleration Sensitivity of STW Resonators using Micromachined Isolation Systems", 1996 IEEE International Frequency Control Symposium, 1996.
6. R. Dean, G. Flowers, K. MacAllister, N. Sanders and M. Kranz, "Micromachined Packaging Structures for Isolating Sensitive Devices from High Frequency Mechanical Vibrations," IMAPS Workshop on Packaging of MEMS and Related Micro-Nano-Bio Integrated Systems, Long Beach, CA, Nov. 18-19, 2004.
7. M. Kranz, T. Hudson, P. Ashley, P. Ruffin, S. Burgett, M. Temmen, and J. Tuck, "A Single Layer Silicon-on-Insulator MEMS Gyroscope For Wide Dynamic Range And Harsh Environment Applications," Transducers '03, Boston, MA, June 9th, 2003.
8. Tai-Ran Hsu, MEMS & Microsystems Design and Manufacture, pp.120-126, McGraw-Hill, Boston, MA, 2002.
9. C. R. Fuller, S. J. Elliot and P. A. Nelson, Active Control of Vibration, pp. 115-152, Academic Press, Harcourt Brace & Company, New York, 1996.
10. K. L. Baxter, Capacitive Sensors, Design and Application, IEEE Press, New York, 1997.
11. R. Dean, G. Flowers, N. Sanders, K. MacAllister, R. Horvath, A. S. Hodel, W. Johnson, M. Kranz and M. Whitley, "Damping Control of Micromachined Lowpass Mechanical Vibration Isolation Filters using Electrostatic Actuation with Electronic Signal Processing," Proceedings of the SPIE International Symposia on Smart Structures & Materials, SPIE Vol. 5760, San Diego, CA, March 6-10, 2005, pp. 11-22.
12. M. S.-C. Lu and G. K. Fedder, "Position Control of Parallel-Plate Microactuators for Probe-Based Data Storage", J. Microelectro-mechanical Systems, Vol. 13, No. 5, pp. 759-769, October 2004.
13. M.-H. Bao, Handbook of Sensors and Actuators, pp. 139-177, Elsevier Science B. V., New York, 2000.
14. th Qtr. 2005.
15. Y. Liu, T. P. Waters, M. J. Brennan, "A Comparison of Semi-Active Damping Control Strategies for Vibration Isolation of Harmonic Disturbances," J. of Sound and Vibration, Vol. 280, pp. 21-39, 2005.
16. R. Dean, G. Flowers, R. Horvath, N. Sanders, S. Hodel, J. Hung and T. Roppel, "Characterization and Experimental Verification of the Nonlinear Distortion in a Technique for Measuring Relative Velocity between Micromachined Structures in Normal Translational Motion," IEEE Sensors Journal, Vol. 7, No. 4, pp. 496-501, April 2007.