In situ diagnostics of RF magnetron sputtering of nylon

Plasma Processes and Polymers

Volumn 6, Issue SUPPL. 1, 2009, Pages

  Kousal, Jaroslav ^a   Hanuš, Jan ^a   Choukourov, Andrei ^a   Polonskyi, Oleksandr ^a   Biederman, Hynek ^a   Slavínská, Danka ^a  

^a CHARLES UNIVERSITY   (Czech Republic)

Author keywords

In situ diagnostics; Magnetron; Nylon; Plasma polymerization; Sputtering

Indexed keywords

CARBON-CONTAINING SPECIES; CHEMICAL COMPOSITIONS; DIAGNOSTIC METHODS; DISCHARGE PLASMA; EX SITU; FTIR SPECTROSCOPY; IN SITU DIAGNOSTICS; IN-SITU; NYLON; RF MAGNETRONS; RF-MAGNETRON SPUTTERING; XPS;

ELECTRIC DISCHARGES; EMISSION SPECTROSCOPY; INFRARED SPECTROSCOPY; MAGNETRON SPUTTERING; MASS SPECTROMETRY; OPTICAL EMISSION SPECTROSCOPY; POLYAMIDES; RAYON;

PLASMA POLYMERIZATION;

EID: 77954932784     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200932001     Document Type: Conference Paper

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