Plasma polymers prepared by RF sputtering of polyethylene

Vacuum

Volumn 70, Issue 4, 2003, Pages 505-509

  Kholodkov, I ^a   Biederman, H ^a   Slavinska D ^a   Choukourov, A ^a   Trchova, M ^a  

^a CHARLES UNIVERSITY   (Czech Republic)

Author keywords

Plasma polymer; Polymer; Sputtering

Indexed keywords

ARGON; ATOMIC FORCE MICROSCOPY; COMPOSITION EFFECTS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MAGNETRON SPUTTERING; PLASTIC FILMS; POLYETHYLENES; THIN FILMS;

HYDROCARBON PLASMA POLYMERS;

PLASMA POLYMERIZATION;

EID: 0037418770     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00702-9     Document Type: Article

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