High-speed nanorobot position control inside a scanning electron microscope

ECTI-CON 2010 - The 2010 ECTI International Conference on Electrical Engineering/Electronics, Computer, Telecommunications and Information Technology

Volumn , Issue , 2010, Pages 513-517

  Jasper, Daniel ^a   Diederichs, Claas ^a   Edeler, Christoph ^a   Fatikow, Sergej ^a  

^a UNIVERSITY OF OLDENBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CLOSED-LOOP; CLOSED-LOOP CONTROL; CONTROL LOOP; HIGH-SPEED; HIGH-THROUGHPUT; LINE SCAN; MULTIPLE DEGREES OF FREEDOM; NANO ROBOTS; NANOHANDLING; NANOROBOT CONTROL; NEW APPROACHES; POSITION SENSING; SCANNING ELECTRON MICROSCOPE;

ELECTRON MICROSCOPES; INFORMATION TECHNOLOGY; JITTER; NANOROBOTICS; ROBOTS; SCANNING; SCANNING ELECTRON MICROSCOPY; SPEED; TRACKING (POSITION);

CLOSED LOOP CONTROL SYSTEMS;

EID: 77954912197     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

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