High-speed position tracking for nanohandling inside scanning electron microscopes

Proceedings - IEEE International Conference on Robotics and Automation

Volumn , Issue , 2009, Pages 508-513

  Jasper, Daniel ^a  

^a UNIVERSITY OF OLDENBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL OVERHEADS; DEFOCUSING; HIGH RESOLUTION SENSORS; HIGH-SPEED; NANOHANDLING; NEW POSITION; OPTICAL ENCODER; POSITION TRACKING; POSITION TRACKING SYSTEM; SCANNING ALGORITHMS; SCANNING ELECTRON MICROSCOPE; STRUCTURED PATTERNS; TRACKING SYSTEM; TUNGSTEN CATHODES; WORKING RANGE;

ELECTRON MICROSCOPES; IMAGE ACQUISITION; NAVIGATION; ROBOTICS; SCANNING; SCANNING ELECTRON MICROSCOPY; TUNGSTEN;

TRACKING (POSITION);

EID: 70350366413     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ROBOT.2009.5152489     Document Type: Conference Paper

References (6)

1. S. Fatikow, T. Wich, H. Ḧulsen, T. Sievers, and M. J̈ahnisch, "Microrobot system for automatic nanohandling inside a scanning electron microscope, " in Proc. of IEEE International Conference on Robotics and Automation (ICRA), May 2006, pp. 1402-1407. (Pubitemid 44940268)
2. S. Ralis, B. Vikramaditya, and B. Nelson, "Micropositioning of a weakly calibrated microassembly system using coarse-to-fine visual servoing strategies, " IEEE Transactions on Electronics Packaging Manufacturing, vol. 23, no. 2, pp. 123-131, 2000.
3. T. Sievers and S. Fatikow, "Visual servoing of a mobile microrobot inside a scanning electron microscope, " in IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS), Aug. 2005, pp. 1350-1354.
4. T. Sievers, M. J̈ahnisch, C. Schrader, and S. Fatikow, "Vision feedback in an automatic nanohandling station inside an SEM, " in 6th Int. Optomechatronics Conference on Visual/Optical Based Assembly and Packaging, SPIE's Optics East, Oct. 2006.
5. K. K. Tan, H. X. Zhou, and T. H. Lee, "New interpolation method for quadrature encoder signals, " IEEE Transactions on Instrumentation and Measurement, vol. 51, no. 5, pp. 1073-1079, Oct. 2002.
6. M. Benammar, L. Ben-brahim, M. Alhamadi, and M. Al-Naemi, "A novel method for estimating the angle from analog co-sinusoidal quadrature signals, " Sensors & Actuators A: Physical, vol. 142, no. 1, pp. 225-231, 2008.