Vision feedback in an automatic nanohandling station inside an SEM

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6376, Issue , 2006, Pages

  Sievers, Torsten ^a   Jähnisch, Marco ^a   Schrader, Christian ^a   Fatikow, Sergej ^a  

^a UNIVERSITY OF OLDENBURG   (Germany)

Author keywords

Force measurement; Image processing; Nanohandling; Scanning electron microscopy; Stereo vision

Indexed keywords

ALGORITHMS; AUTOMATIC PROGRAMMING; COMPUTER VISION; FEEDBACK; FORCE MEASUREMENT; MATHEMATICAL MODELS; STEREO VISION;

ENERGY MODEL; NANOHANDLING; STEREOSCOPIC IMAGES;

SCANNING ELECTRON MICROSCOPY;

EID: 33846234662     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.684178     Document Type: Conference Paper

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