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Volumn 6, Issue SUPPL. 1, 2009, Pages
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A versatile system for large area coating of nanocomposite thin films
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Author keywords
Clusters; DC discharges; HF discharges; Metal containing coatings; Nanocomposites; Nanotechnology; Particles; Plasma polymerization; Plasma enhanced chemical vapor deposition (PECVD)
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Indexed keywords
CLUSTERS;
DC DISCHARGES;
DEPOSITION SYSTEMS;
DISCHARGE PARAMETERS;
GAS FLOWS;
GAS PHASE CONDENSATION;
HF DISCHARGES;
HIGH DEPOSITION RATES;
HOLLOW CATHODES;
INORGANIC COMPOSITES;
LARGE-AREA COATING;
MATRIX;
MATRIX MATERIALS;
METAL NANOPARTICLES;
NANOCOMPOSITE FILM;
NANOCOMPOSITE THIN FILMS;
NANOPARTICLE FILMS;
ORGANIC PRECURSOR;
PLASMA POLYMERS;
PULSED DISCHARGE;
SOURCE PARAMETERS;
VACUUM ENVIRONMENT;
VACUUM SYSTEM;
VARIOUS SUBSTRATES;
VERSATILE SYSTEM;
COATINGS;
DEPOSITION;
INORGANIC COMPOUNDS;
METALS;
NANOCOMPOSITES;
NANOPARTICLES;
NANOTECHNOLOGY;
PLASMA DEPOSITION;
PLASMA DIAGNOSTICS;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
PLASMA POLYMERIZATION;
PLASMAS;
POLYMERS;
VACUUM;
VAPOR DEPOSITION;
ELECTRIC DISCHARGES;
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EID: 77954909957
PISSN: 16128850
EISSN: 16128869
Source Type: Journal
DOI: 10.1002/ppap.200932304 Document Type: Conference Paper |
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Times cited : (11)
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References (16)
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