Formation of clusters through generation of free atoms

Physica Scripta

Volumn 73, Issue 3, 2006, Pages 288-295

  Smirnov, Boris M ^a   Shyjumon, Ibrahimkutty ^b   Hippler, Rainer ^b  

^a JOINT INSTITUTE FOR HIGH TEMPERATURES   (Russian Federation)

^b UNIVERSITY OF GREIFSWALD   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; EVAPORATION; FUNCTIONS; MAGNETRONS; TITANIUM;

BALANCE EQUATIONS; CATHODE EROSION; CLUSTER GENERATION; SUPERSATURATED VAPOURS;

SUPERSATURATION;

EID: 33745499636     PISSN: 00318949     EISSN: 14024896     Source Type: Journal    
DOI: 10.1088/0031-8949/73/3/009     Document Type: Article

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