Study of the sputtered Cu atoms and Cu+ ions in a hollow cathode glow discharge using a hybrid model

Journal of Applied Physics

Volumn 98, Issue 3, 2005, Pages

  Baguer, N ^a   Bogaerts, A ^a  

^a UNIVERSITY OF ANTWERP   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODE MATERIALS; CU ATOMS; HOLLOW CATHODE DISCHARGE (HCD); REDEPOSITION;

CATHODES; CONCENTRATION (PROCESS); DEPOSITION; IONIZATION; IONS; MATHEMATICAL MODELS; MONTE CARLO METHODS; SPUTTERING;

COPPER;

EID: 23944499617     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2005381     Document Type: Article

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