Traceable nanoscale length metrology using a metrological Scanning Probe Microscope

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7729, Issue , 2010, Pages

  Lawn, Malcolm ^a   Herrmann, Jan ^a   Freund, Christopher H ^a   Miles, John R ^a   Gray, Malcolm ^a   Shaddock, Daniel ^b   Coleman, Victoria A ^a   Jämting, Åsa K ^a  

^a NATIONAL MEASUREMENT INSTITUTE   (Australia)

^b AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

AFM; interferometry; mSPM; non contact mode; quartz tuning fork

Indexed keywords

AFM; AUSTRALIA; DIMENSIONAL MEASUREMENTS; LENGTH METROLOGY; MEASUREMENT VOLUME; NANO SCALE; NANO-METER SCALE; NANOMETROLOGY; NATIONAL MEASUREMENT INSTITUTE; NON-CONTACT MODE; QUARTZ TUNING FORK; SCANNING PROBE MICROSCOPE;

ATOMIC FORCE MICROSCOPY; OXIDE MINERALS; POSITION MEASUREMENT; PROBES; QUARTZ; SCANNING; TUNING; UNCERTAINTY ANALYSIS;

INTERFEROMETRY;

EID: 77954478712     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.853788     Document Type: Conference Paper

References (18)

1. Organisation Intergouvernementale de la Convention du Mètre, "The International System of Units (SI), eighth edition", BIPM Sèvres, 112 (2006), www.bipm.org/en/si/si-brochure.
2. Udem, Th., Holzwarth, R., and Hänsch, Th., "Femtosecond optical frequency combs", Eur. Phys. J. Special Topics, 172, 69-79 (2009), www.springerlink.com/content/l0115433338120p4/fulltext.pdf.
3. Smith, S. T., and Chetwynd, D. G., "Foundations of ultraprecision mechanism design", Gordon and Breach, Amsterdam (1998).
4. Wilkening, G., and Koenders, L., Eds, "Nanoscale calibration standards and methods", Wiley-VCH, Weinheim (2005).
5. Danzebrink, H. U., Koenders, L., Wilkening, G., Yacoot, A., and Kunzmann, H., "Advances in scanning force microscopy for dimensional metrology", CIRP Annals-Manufact. Technol., 55, 841-878 (2006). (Pubitemid 46148819)
6. Koops K. R., van Veghel M. G. A., Kotte G. J. W. L., and Moolman M. C., "Calibration strategies for scanning probe metrology", Meas. Sci. Technol. 18, 390-394 (2007).
7. Korpelainen, V., and Lassila, A., "Calibration of a commercial AFM: traceability for a coordinate system", Meas. Sci. Technol., 18, 395-403 (2007). (Pubitemid 46603774)
8. Koning, R., Flugge, J., and Bosse, H., "A method for in situ determination of Abbé errors and their correction", Meas. Sci. Technol. 18, 476-481 (2007). (Pubitemid 46603784)
9. Giessibl, F. J., "Advances in atomic force microscopy", Rev. Mod. Phys. 75, 949-983 (2003).
10. Giessibl, F. J., Hembacher, S., Bielefeldt, H., and Mannhart, J., "Subatomic features on the silicon(111)-(7x7) surface observed by atomic force microscopy", Science 289, 422-425 (2000).
11. Gunther, P. Ch., Fischer, U., and Dransfeld, K., "Scanning near-field acoustic microscopy", Appl. Phys. B 48, 89-92 (1989).
12. Tyrrell, J. W. G., Sokolov, D. V., and Danzebrink, H. U., "Development of a scanning probe microscope compact sensor head featuring a diamond probe mounted on a quartz tuning fork", Meas. Sci. Technol. 14, 2139-2143 (2003).
13. Castellanos-Gomez, A., Agrait, N., and Rubion-Bollinger G., "Dynamics of quartz tuning fork force sensors used in scanning probe microscopy", Nanotechnology 20, 215502-215509 (2009).
14. Bobroff, N., "Recent advances in displacement measuring interferometry", Meas. Sci. Technol. 4, 907-926 (1993).
15. Berthold III, J. W., Jacobs, S. F., and Norton, M. A., "Dimensional stability of silica Invar, and several.ultralow-thermal expansion materials", Metrologia 13, 9-16 (1977).
16. th International LISA Symposium, Merkowitz, S. M. and Livas, J. C., Eds., American Institute of Physics, 654-660 (2006).
17. National Instruments, www.ni.com.
18. Jacobs, S. F., Johnston, C. and Schwab, D. E., "Dimensional instability of Invars", Appl. Opt. 23, 3500-3502 (1984).