Comparison of optical and stylus methods for measurement of surface texture

International Journal of Advanced Manufacturing Technology

Volumn 33, Issue 1-2, 2007, Pages 110-118

  Vorburger, T V ^a   Rhee, H G ^a,b   Renegar, T B ^a   Song, J F ^a   Zheng, A ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b Korea Research Institute of Standards and Science   (South Korea)

Author keywords

Confocal; Interferometric; Metrology; Microscopy; Optical; Stylus; Surface; White light

Indexed keywords

INTERFEROMETRY; PLANIMETERS; PROJECT MANAGEMENT; STANDARDIZATION; SURFACE MEASUREMENT; SURFACE ROUGHNESS;

STYLUS METHOD; SURFACE TEXTURE; WHITE LIGHT;

SURFACE MORPHOLOGY;

EID: 34250762154     PISSN: 02683768     EISSN: 14333015     Source Type: Journal    
DOI: 10.1007/s00170-007-0953-8     Document Type: Article

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