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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 28, Issue 4, 2010, Pages 515-522

Deposition of aluminum-doped zinc oxide thin films for optical applications using rf and dc magnetron sputter deposition

(2) Sivakumar, Kousik a,b Rossnagel, S M a

a IBM RESEARCH (United States)

b L J Gonzer Associates Inc (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM-DOPED ZINC OXIDE; ASAHI GLASS; BAND GAPS; DIELECTRIC DEPOSITION; EFFECT OF OXYGEN; ELECTRICAL AND OPTICAL PROPERTIES; FILM PROPERTIES; GLASS SUBSTRATES; MAGNETRON POWER; MAGNETRON SPUTTER DEPOSITION; OPTICAL APPLICATIONS; OXYGEN PARTIAL PRESSURE; PHOTOVOLTAIC APPLICATIONS; PROCESS CONDITION; RF-MAGNETRON SPUTTERING; ROOM TEMPERATURE; SPUTTERED FILMS; ZNO;

ALUMINUM; ALUMINUM COATINGS; DC POWER TRANSMISSION; DEPOSITION; ELECTRIC PROPERTIES; ENERGY GAP; GLASS; GRAIN GROWTH; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; OXIDE FILMS; OXYGEN; PRESSURE EFFECTS; RAPID THERMAL ANNEALING; RAPID THERMAL PROCESSING; STOICHIOMETRY; SUBSTRATES; ZINC; ZINC OXIDE;

OPTICAL FILMS;

EID: 77954210173 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.3425640 Document Type: Conference Paper

Times cited : (14)

References (21)

1
- 0032624139
- ASUSEE 0169-4332,. 10.1016/S0169-4332(98)00654-0
- Y. Nakanishi, A. Miyake, and H. Kominami, Appl. Surf. Sci. ASUSEE 0169-4332 142, 233 (1999). 10.1016/S0169-4332(98)00654-0
- (1999) Appl. Surf. Sci. , vol.142 , pp. 233
- Nakanishi, Y.¹ Miyake, A.² Kominami, H.³

2
- 0033688035
- JCRGAE 0022-0248,. 10.1016/S0022-0248(00)00068-3
- K. Haga, M. Kamidaira, and Y. Kashiwaba, J. Cryst. Growth JCRGAE 0022-0248 214-215, 77 (2000). 10.1016/S0022-0248(00)00068-3
- (2000) J. Cryst. Growth , vol.214-215 , pp. 77
- Haga, K.¹ Kamidaira, M.² Kashiwaba, Y.³

3
- 0033221413
- Growth of polycrystalline GaN on silicon (001) substrates by RF plasma chemical vapor deposition with ZnO buffer layer
- DOI 10.1002/(SICI)1521-396X(199911)176:1<579::AID-PSSA579>3.0.CO;2- N
- D. C. Park, Sz. Fujita, and Sg. Fujita, Phys. Status Solidi A PSSABA 0031-8965 176, 579 (1999). 10.1002/(SICI)1521-396X(199911)176:1<579::AID- PSSA579>3.0.CO;2-N (Pubitemid 32082040)
- (1999) Physica Status Solidi (A) Applied Research , vol.176 , Issue.1 , pp. 579-582
- Park, D.C.¹ Fujita, Sz.² Fujita, Sg.³

4
- 0033896905
- Magnetron sputtering: A review of recent developments and applications
- DOI 10.1016/S0042-207X(99)00189-X
- P. J. Kelly and R. D. Arnell, Vacuum VACUAV 0042-207X 56, 159 (2000). 10.1016/S0042-207X(99)00189-X (Pubitemid 30564470)
- (2000) Vacuum , vol.56 , Issue.3 , pp. 159-172
- Kelly, P.J.¹ Arnell, R.D.²

5
- 15844366596
- Growth of Al-doped ZnO thin films by pulsed DC magnetron sputtering
- DOI 10.1016/j.jcrysgro.2005.01.061, PII S0022024805000953
- H. Ko, W. P. Tai, K. C. Kim, S. H. Kim, S. J. Suh, and Y. S. Kim, J. Cryst. Growth JCRGAE 0022-0248 277, 352 (2005). 10.1016/j.jcrysgro.2005.01.061 (Pubitemid 40424451)
- (2005) Journal of Crystal Growth , vol.277 , Issue.1-4 , pp. 352-358
- Ko, H.¹ Tai, W.-P.² Kim, K.-C.³ Kim, S.-H.⁴ Suh, S.-J.⁵ Kim, Y.-S.⁶

6
- 71049188085
- JVTAD6 0734-2101,. 10.1116/1.3242421
- Wonkyun Yang and Junghoon Joo, J. Vac. Sci. Technol. A JVTAD6 0734-2101 27, 1310 (2009). 10.1116/1.3242421
- (2009) J. Vac. Sci. Technol. A , vol.27 , pp. 1310
- Yang, W.¹ Joo, J.²

7
- 0035123978
- Argon gas pressure dependence of the properties of transparent conducting ZnO:Al films deposited on glass substrates
- DOI 10.1016/S0169-4332(00)00748-0
- Y. Igasaki and H. Kanma, Appl. Surf. Sci. ASUSEE 0169-4332 169-170, 508 (2001). 10.1016/S0169-4332(00)00748-0 (Pubitemid 32195627)
- (2001) Applied Surface Science , vol.169-170 , pp. 508-511
- Igasaki, Y.¹ Kanma, H.²

8
- 33748144907
- (in press)
- Wonkyun Yang and Junghoon Joo, Thin Solid Films (in press).
- Thin Solid Films
- Yang, W.¹ Joo, J.²

9
- 75649111680
- JVTBD9 1071-1023,. 10.1116/1.3110020
- C. Lennon, R. Kodama, Y. Chang, S. Sivanathan, and M. Deshpande, J. Vac. Sci. Technol. B JVTBD9 1071-1023 27, 1641 (2009). 10.1116/1.3110020
- (2009) J. Vac. Sci. Technol. B , vol.27 , pp. 1641
- Lennon, C.¹ Kodama, R.² Chang, Y.³ Sivanathan, S.⁴ Deshpande, M.⁵

10
- 29344436064
- KPSJAS 0374-4884.
- Jinsu Yoo, S. K. Dhungel, M. Gowtham, J. Yi, J. Lee, S. Kim, K. Yoon, I. J. Park, and J. Song, J. Korean Phys. Soc. KPSJAS 0374-4884 47, S576 (2005).
- (2005) J. Korean Phys. Soc. , vol.47 , pp. 576
- Yoo, J.¹ Dhungel, S.K.² Gowtham, M.³ Yi, J.⁴ Lee, J.⁵ Kim, S.⁶ Yoon, K.⁷ Park, I.J.⁸ Song, J.⁹

11
- 34247524120
- Comparative study of zinc oxide and aluminum doped zinc oxide transparent thin films grown by direct current magnetron sputtering
- DOI 10.1016/j.tsf.2006.11.151, PII S0040609006013927
- M. Suchea, S. Christoulakis, N. Katsarakis, T. Kitsopolous, and G. Kiriakidis, Thin Solid Films THSFAP 0040-6090 515, 6562 (2007). 10.1016/j.tsf.2006.11.151 (Pubitemid 46660898)
- (2007) Thin Solid Films , vol.515 , Issue.16 SPEC. ISS. , pp. 6562-6566
- Suchea, M.¹ Christoulakis, S.² Katsarakis, N.³ Kitsopoulos, T.⁴ Kiriakidis, G.⁵

12
- 36549094294
- JAPIAU 0021-8979,. 10.1063/1.342419
- Z. C. Jin, I. Hamberg, and C. G. Granqvist, J. Appl. Phys. JAPIAU 0021-8979 64, 5117 (1988). 10.1063/1.342419
- (1988) J. Appl. Phys. , vol.64 , pp. 5117
- Jin, Z.C.¹ Hamberg, I.² Granqvist, C.G.³

13
- 0031212013
- THSFAP 0040-6090,. 10.1016/S0040-6090(97)00215-0
- K. C. Park, D. Y. Ma, and K. H. Kim, Thin Solid Films THSFAP 0040-6090 305, 201 (1997). 10.1016/S0040-6090(97)00215-0
- (1997) Thin Solid Films , vol.305 , pp. 201
- Park, K.C.¹ Ma, D.Y.² Kim, K.H.³

14
- 0037463269
- THSFAP 0040-6090,. 10.1016/S0040-6090(03)00014-2
- J. -H. Lee and B. -O. Park, Thin Solid Films THSFAP 0040-6090 426, 94 (2003). 10.1016/S0040-6090(03)00014-2
- (2003) Thin Solid Films , vol.426 , pp. 94
- Lee, J.-H.¹ Park, B.-O.²

15
- 0035208404
- Influence of the annealing conditions on the properties of ZnO thin films
- DOI 10.1016/S1466-6049(01)00113-1, PII S1466604901001131
- P. Nunes, E. Fortunato, and R. Martins, Int. J. Inorg. Mater. IJIMCR 1466-6049 3, 1125 (2001). 10.1016/S1466-6049(01)00113-1 (Pubitemid 33151762)
- (2001) International Journal of Inorganic Materials , vol.3 , Issue.8 , pp. 1125-1128
- Nunes, P.¹ Fortunato, E.² Martins, R.³

16
- 0033314480
- Optical and electronic properties of transparent conducting ZnO and ZnO:Al films prepared by evaporating method
- DOI 10.1016/S0040-6090(99)00357-0
- M. Jin, J. Feng, Z. De-heng, M. Hong-lei, and L. Shu-ying, Thin Solid Films THSFAP 0040-6090 357, 98 (1999). 10.1016/S0040-6090(99)00357-0 (Pubitemid 30546417)
- (1999) Thin Solid Films , vol.357 , Issue.2 , pp. 98-101
- Jin, M.¹ Feng, J.² De-Heng, Z.³ Hong-Lei, M.⁴ Shu-Ying, L.⁵

17
- 0003759821
- (Institute of Physics, London).
- H. L. Hartnagel, A. L. Dawar, A. K. Jain, and C. Jagadish, Semiconducting Transparent Films (Institute of Physics, London, 1995).
- (1995) Semiconducting Transparent Films
- Hartnagel, H.L.¹ Dawar, A.L.² Jain, A.K.³ Jagadish, C.⁴

18
- 0001590465
- JAPIAU 0021-8979,. 10.1063/1.362842
- V. Gupta and A. Mansingh, J. Appl. Phys. JAPIAU 0021-8979 80, 1063 (1996). 10.1063/1.362842
- (1996) J. Appl. Phys. , vol.80 , pp. 1063
- Gupta, V.¹ Mansingh, A.²

19
- 0000139470
- JAPIAU 0021-8979,. 10.1063/1.366798
- R. Cebulla, R. Wendt, and K. Ellmer, J. Appl. Phys. JAPIAU 0021-8979 83, 1087 (1998). 10.1063/1.366798
- (1998) J. Appl. Phys. , vol.83 , pp. 1087
- Cebulla, R.¹ Wendt, R.² Ellmer, K.³

20
- 31144466486
- Post-growth annealing of zinc oxide thin films pulsed laser deposited under enhanced oxygen pressure on quartz and silicon substrates
- DOI 10.1016/j.mseb.2005.10.012, PII S0921510705006689
- M. Rusop, K. Uma, T. Soga, and T. Jimbo, Mater. Sci. Eng., B MSBTEK 0921-5107 127, 150 (2006). 10.1016/j.mseb.2005.10.012 (Pubitemid 43133007)
- (2006) Materials Science and Engineering B: Solid-State Materials for Advanced Technology , vol.127 , Issue.2-3 , pp. 150-153
- Rusop, M.¹ Uma, K.² Soga, T.³ Jimbo, T.⁴

21
- 0001447933
- PRBMDO 0163-1829,. 10.1103/PhysRevB.37.10244
- B. E. Sernelius, K. F. Berggren, Z. C. Jin, I. Hamberg, and C. G. Granqvist, Phys. Rev. B PRBMDO 0163-1829 37, 10244 (1988). 10.1103/PhysRevB.37. 10244
- (1988) Phys. Rev. B , vol.37 , pp. 10244
- Sernelius, B.E.¹ Berggren, K.F.² Jin, Z.C.³ Hamberg, I.⁴ Granqvist, C.G.⁵

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